Influence of doping (Ti, V, Zr, W) and annealing on the sp2 carbon structure of amorphous carbon films

Journal of Applied Physics

Volumn 105, Issue 3, 2009, Pages

  Adelhelm, C ^a   Balden, M ^a   Rinke, M ^b   Stueber, M ^b  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS FILMS; ANNEALING; AROMATIC COMPOUNDS; CARBIDES; CARBON CLUSTERS; CRYSTALLITE SIZE; DIFFRACTION; DOPING (ADDITIVES); ELECTRODEPOSITION; FILM GROWTH; GRAPHITE; GROWTH (MATERIALS); METAL ANALYSIS; MOLECULAR BEAM EPITAXY; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SPECTRUM ANALYSIS; TRANSITION METALS; X RAY ANALYSIS; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM;

AMORPHOUS CARBON FILMS; ANNEALING TEMPERATURES; AROMATIC CLUSTERS; CARBON MATRICES; CARBON STRUCTURES; CATALYTIC ACTIVITIES; DIFFRACTION PEAKS; GRAPHENE; METAL-DOPED AMORPHOUS CARBONS; NANO-STRUCTURING; ROOM TEMPERATURES; THIN-FILM GROWTHS; X-RAY DIFFRACTIONS; XRD;

CARBON FILMS;

EID: 60449084192     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3075843     Document Type: Article

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