|
Volumn 42, Issue 21, 2009, Pages
|
Structure of sp2 dominant a-C film with superhardness
|
Author keywords
[No Author keywords available]
|
Indexed keywords
A-C FILM;
AMORPHOUS CARBON (A-C);
AMORPHOUS MATRICES;
ELASTIC RECOVERY;
FILM STRUCTURE;
SUPERHARDNESS;
AMORPHOUS CARBON;
CARBON FILMS;
MECHANICAL PROPERTIES;
MICROSTRUCTURE;
AMORPHOUS FILMS;
|
EID: 70450188110
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/42/21/215303 Document Type: Article |
Times cited : (17)
|
References (22)
|