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Volumn 106, Issue 12, 2009, Pages

Microstructure and tribological properties of Ti-contained amorphous carbon film deposited by DC magnetron sputtering

Author keywords

[No Author keywords available]

Indexed keywords

A-C FILM; ADHESIVE STRENGTH; AMORPHOUS CARBON (A-C); BALL-ON-DISK; CHEMICAL COMPOSITIONS; CLOSED FIELD UNBALANCED MAGNETRON SPUTTERING; DC MAGNETRON SPUTTERING; FRICTION COEFFICIENTS; HIGH HARDNESS; HIGH-SPEED STEELS; HUMID AIR; MECHANICAL AND TRIBOLOGICAL PROPERTIES; NANOINDENTOR; RAMAN SPECTRA; ROCKWELL; SCRATCH TEST; TRIBOLOGICAL PROPERTIES; TRIBOMETERS; WEAR RATES;

EID: 73849118472     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3272018     Document Type: Article
Times cited : (32)

References (33)
  • 1
    • 0037165927 scopus 로고    scopus 로고
    • 10.1016/S0927-796X(02)00005-0 0927-796X
    • J. Robertson, Mater. Sci. Eng., R. 37, 129 (2002). 10.1016/S0927-796X(02) 00005-0 0927-796X
    • (2002) Mater. Sci. Eng., R. , vol.37 , pp. 129
    • Robertson, J.1
  • 2
    • 0022754765 scopus 로고
    • 0001-8732. 10.1080/00018738600101911
    • J. Robertson, Adv. Phys. 0001-8732 35, 317 (1986). 10.1080/ 00018738600101911
    • (1986) Adv. Phys. , vol.35 , pp. 317
    • Robertson, J.1
  • 4
    • 20744458042 scopus 로고    scopus 로고
    • Nanostructured TiC/a-C coatings for low friction and wear resistant applications
    • DOI 10.1016/j.surfcoat.2004.10.106, PII S0257897204010618
    • Y. T. Pei, D. Galvan, J. T. M. De Hosson, and A. Cavaleiro, Surf. Coat. Technol. 0257-8972 198, 44 (2005). 10.1016/j.surfcoat.2004.10.106 (Pubitemid 40854658)
    • (2005) Surface and Coatings Technology , vol.198 , Issue.1-3 SPEC. ISS. , pp. 44-50
    • Pei, Y.T.1    Galvan, D.2    De Hosson, J.T.M.3    Cavaleiro, A.4
  • 6
    • 0034310533 scopus 로고    scopus 로고
    • 0257-8972. 10.1016/S0257-8972(00)00888-4
    • T. Zehnder and J. Patscheider, Surf. Coat. Technol. 0257-8972 133-134, 138 (2000). 10.1016/S0257-8972(00)00888-4
    • (2000) Surf. Coat. Technol. , vol.133-134 , pp. 138
    • Zehnder, T.1    Patscheider, J.2
  • 7
    • 0026407578 scopus 로고
    • 0257-8972. 10.1016/0257-8972(91)90114-C
    • H. Dimigen and C. P. Klages, Surf. Coat. Technol. 0257-8972 49, 543 (1991). 10.1016/0257-8972(91)90114-C
    • (1991) Surf. Coat. Technol. , vol.49 , pp. 543
    • Dimigen, H.1    Klages, C.P.2
  • 8
    • 0025535294 scopus 로고
    • 0042-207X. 10.1016/0042-207X(90)93936-D
    • M. Fryda, K. Taube, and C. P. Klages, Vacuum 0042-207X 41, 1291 (1990). 10.1016/0042-207X(90)93936-D
    • (1990) Vacuum , vol.41 , pp. 1291
    • Fryda, M.1    Taube, K.2    Klages, C.P.3
  • 9
    • 23144432570 scopus 로고    scopus 로고
    • Cr-diamondlike carbon nanocomposite films: Synthesis, characterization and properties
    • DOI 10.1016/j.tsf.2005.04.104, PII S0040609005004682
    • V. Singh, J. C. Jiang, and E. I. Meletis, Thin Solid Films 0040-6090 489, 150 (2005). 10.1016/j.tsf.2005.04.104 (Pubitemid 41084158)
    • (2005) Thin Solid Films , vol.489 , Issue.1-2 , pp. 150-158
    • Singh, V.1    Jiang, J.C.2    Meletis, E.I.3
  • 10
    • 54349118213 scopus 로고    scopus 로고
    • 0043-1648. 10.1016/j.wear.2008.03.017
    • G. M. Wilson, J. F. Smith, and J. L. Sullivan, Wear 0043-1648 265, 1633 (2008). 10.1016/j.wear.2008.03.017
    • (2008) Wear , vol.265 , pp. 1633
    • Wilson, G.M.1    Smith, J.F.2    Sullivan, J.L.3
  • 11
    • 0034296230 scopus 로고    scopus 로고
    • Erratum to: 'Effect of target material on deposition and properties of metal-containing DLC (Me-DLC) coatings' [Surf. Coat. Technol. 127 (2000) 224-234]
    • DOI 10.1016/S0257-8972(00)00746-5
    • K. Bewilogua, C. V. Cooper, C. Specht, J. Schroder, R. Wittorf, and M. Grischke, Surf. Coat. Technol. 0257-8972 132, 275 (2000). 10.1016/S0257-8972(00) 00746-5 (Pubitemid 32023044)
    • (2000) Surface and Coatings Technology , vol.132 , Issue.2-3 , pp. 275-283
    • Bewilogua, K.1    Cooper, C.V.2    Specht, C.3    Schroder, J.4    Wittorf, R.5    Grischke, M.6
  • 12
  • 13
    • 43949126162 scopus 로고    scopus 로고
    • Tribological properties of multilayer DLC/W-DLC films on Si
    • DOI 10.1016/j.tsf.2007.07.113, PII S0040609007012096
    • H. Miki, T. Takeno, and T. Takagi, Thin Solid Films 0040-6090 516, 5414 (2008). 10.1016/j.tsf.2007.07.113 (Pubitemid 351707459)
    • (2008) Thin Solid Films , vol.516 , Issue.16 , pp. 5414-5418
    • Miki, H.1    Takeno, T.2    Takagi, T.3
  • 14
    • 33751249318 scopus 로고    scopus 로고
    • Investigation of processing parameters for pulsed closed-field unbalanced magnetron co-sputtered TiC-C thin films
    • DOI 10.1016/j.surfcoat.2006.08.015, PII S0257897206008267
    • J. M. Anton, B. Mishra, J. J. Moore, J. A. Rees, and W. D. Sproul, Surf. Coat. Technol. 0257-8972 201, 4131 (2006). 10.1016/j.surfcoat.2006.08.015 (Pubitemid 44783100)
    • (2006) Surface and Coatings Technology , vol.201 , Issue.7 SPEC. ISS. , pp. 4131-4135
    • Anton, J.M.1    Mishra, B.2    Moore, J.J.3    Rees, J.A.4    Sproul, W.D.5
  • 15
    • 33748437054 scopus 로고    scopus 로고
    • Influence of deposition parameters on the structure and mechanical properties of nanocomposite coatings
    • DOI 10.1016/j.surfcoat.2005.12.007, PII S0257897205013629
    • D. Galvan, Y. T. Pei, and J. T. M. De Hosson, Surf. Coat. Technol. 0257-8972 201, 590 (2006). 10.1016/j.surfcoat.2005.12.007 (Pubitemid 44340759)
    • (2006) Surface and Coatings Technology , vol.201 , Issue.3-4 , pp. 590-598
    • Galvan, D.1    Pei, Y.T.2    De Hosson, J.T.M.3
  • 17
    • 0031647054 scopus 로고    scopus 로고
    • 0022-2461. 10.1023/A:1004307426887
    • A. A. Voevodin and J. S. Zabinski, J. Mater. Sci. 0022-2461 33, 319 (1998). 10.1023/A:1004307426887
    • (1998) J. Mater. Sci. , vol.33 , pp. 319
    • Voevodin, A.A.1    Zabinski, J.S.2
  • 18
    • 0033361636 scopus 로고    scopus 로고
    • Characterization of hydrogen-free diamond-like carbon films deposited by pulsed plasma technology
    • DOI 10.1016/S0040-6090(99)00513-1
    • D. Y. Wang, C. L. Chang, and W. Y. Ho, Thin Solid Films 0040-6090 355-356, 246 (1999). 10.1016/S0040-6090(99)00513-1 (Pubitemid 30523208)
    • (1999) Thin Solid Films , vol.355 , pp. 246-251
    • Wang, D.-Y.1    Chang, C.-L.2    Ho, W.-Y.3
  • 21
    • 33847357319 scopus 로고    scopus 로고
    • Droplet-free TiC nanocrystal-containing diamond-like carbon coatings deposited by combined cathodic arc MF magnetron sputtering
    • DOI 10.1016/j.surfcoat.2006.09.082, PII S0257897206011054, The Eighth International Workshop on Plasma-Based Ion Implantation and Deposition
    • B. Yang, Z. H. Huang, H. T. Gao, X. J. Fan, and D. J. Fu, Surf. Coat. Technol. 0257-8972 201, 6808 (2007). 10.1016/j.surfcoat.2006.09.082 (Pubitemid 46336743)
    • (2007) Surface and Coatings Technology , vol.201 , Issue.15 , pp. 6808-6811
    • Yang, B.1    Huang, Z.H.2    Gao, H.T.3    Fan, X.J.4    Fu, D.J.5
  • 22
    • 0033896905 scopus 로고    scopus 로고
    • Magnetron sputtering: A review of recent developments and applications
    • DOI 10.1016/S0042-207X(99)00189-X
    • P. J. Kelly and R. D. Arnell, Vacuum 0042-207X 56, 159 (2000). 10.1016/S0042-207X(99)00189-X (Pubitemid 30564470)
    • (2000) Vacuum , vol.56 , Issue.3 , pp. 159-172
    • Kelly, P.J.1    Arnell, R.D.2
  • 23
    • 0242603790 scopus 로고    scopus 로고
    • 0163-1829. 10.1103/PhysRevB.61.14095
    • A. C. Ferrari and J. Robertson, Phys. Rev. B 0163-1829 61, 14095 (2000). 10.1103/PhysRevB.61.14095
    • (2000) Phys. Rev. B , vol.61 , pp. 14095
    • Ferrari, A.C.1    Robertson, J.2
  • 24
    • 0026875935 scopus 로고
    • 0884-2914. 10.1557/JMR.1992.1564
    • W. C. Oliver and G. M. Pharr, J. Mater. Res. 0884-2914 7, 1564 (1992). 10.1557/JMR.1992.1564
    • (1992) J. Mater. Res. , vol.7 , pp. 1564
    • Oliver, W.C.1    Pharr, G.M.2
  • 25
    • 58149493531 scopus 로고    scopus 로고
    • 10.1088/1748-6041/3/4/044103 1748-6041
    • Y. F. Zheng, D. Liu, X. L. Liu, and L. Li, Biomed. Mater. 3, 044103 (2008). 10.1088/1748-6041/3/4/044103 1748-6041
    • (2008) Biomed. Mater. , vol.3 , pp. 044103
    • Zheng, Y.F.1    Liu, D.2    Liu, X.L.3    Li, L.4
  • 27
    • 33846322566 scopus 로고    scopus 로고
    • Improving mechanical properties of amorphous carbon nitride films by titanium doping
    • DOI 10.1063/1.2404797
    • P. Xu, J. J. Li, Q. Wang, Z. L. Wang, C. Z. Gu, and Z. Cui, J. Appl. Phys. 0021-8979 101, 014312 (2007). 10.1063/1.2404797 (Pubitemid 46120681)
    • (2007) Journal of Applied Physics , vol.101 , Issue.1 , pp. 014312
    • Xu, P.1    Li, J.J.2    Wang, Q.3    Wang, Z.L.4    Gu, C.Z.5    Cui, Z.6
  • 29
    • 0031246460 scopus 로고    scopus 로고
    • 0257-8972. 10.1016/S0257-8972(97)00458-1
    • A. Grill, Surf. Coat. Technol. 0257-8972 94-95, 507 (1997). 10.1016/S0257-8972(97)00458-1
    • (1997) Surf. Coat. Technol. , vol.9495 , pp. 507
    • Grill, A.1
  • 32
    • 0035387329 scopus 로고    scopus 로고
    • Tribological properties and wear mechanism of sputtered C/Cr coating
    • DOI 10.1016/S0257-8972(01)01147-1, PII S0257897201011471, Proceedings of the 7th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 17-21, 2000
    • S. Yang, X. Li, N. M. Renevier, and D. G. Teer, Surf. Coat. Technol. 0257-8972 142-144, 85 (2001). 10.1016/S0257-8972(01)01147-1 (Pubitemid 32931703)
    • (2001) Surface and Coatings Technology , vol.142-144 , pp. 85-93
    • Yang, S.1    Li, X.2    Renevier, N.M.3    Teer, D.G.4
  • 33
    • 7444239033 scopus 로고    scopus 로고
    • 0301-679X. 10.1016/j.triboint.2004.07.012
    • S. K. Field, M. Jarratt, and D. G. Teer, Tribol. Int. 0301-679X 37, 949 (2004). 10.1016/j.triboint.2004.07.012
    • (2004) Tribol. Int. , vol.37 , pp. 949
    • Field, S.K.1    Jarratt, M.2    Teer, D.G.3


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