SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Diamond and Related Materials

Volumn 11, Issue 10, 2002, Pages 1721-1730

The enhancement of interconnected sp3 sites by chemical effects during ta-C film growth

(1) Neuville, Stephan a

a Plasma Innovation ^* (France)

Author keywords

Catalysts; Mobility; Rearrangement; Ta C

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND LIKE CARBON FILMS; GROWTH (MATERIALS); HARDNESS;

RADIO FREQUENCY (RF); TETRAHEDRICITY ENHANCEMENT;

DIAMONDS;

CARBON;

EID: 0036794409 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(02)00061-4 Document Type: Article

Times cited : (22)

References (64)

1
- 2142844085
- IOS Press, Amsterdam
- (1997) Proceedings of the International School of Physics Enrico Fermi , pp. 135
- Lifshitz, Y.¹

2
- 0002272533
- (1997) MRS Bull , vol.22 , Issue.9 , pp. 22
- Neuville, S.¹ Matthews, A.²

3
- 0026799663
- (1991) Diamond Relat. Mater , vol.1 , pp. 397
- Robertson, J.¹

4
- 0000560714
- (1997) J. Appl. Phys , vol.81 , pp. 139
- Xu, S.¹

5
- 0000608202
- (1996) Appl. Phys. Lett , vol.69 , pp. 491
- Ravi, S.¹

6
- 0027594710
- (1993) Surf. Coat. Technol , vol.57 , pp. 111
- Scheibe, H.J.¹ Klaffke, D.²

7
- 18544366860
- (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 1778
- Angus, J.C.¹ Jansen, F.²

8
- 0029342628
- (1995) Surf. Sci , vol.331-333 , pp. 283-288
- Gouzman, I.¹ Brener, R.² Hoffman, A.³

9
- 0000360882
- (1995) Int. J. Modern Phys. D , vol.9 , pp. 3527
- Marton, D.¹ Boyd, K.J.² Rabalais, J.W.³

10
- 0042059097
- (1990) Phys. Rev. B , vol.41 , pp. 10727
- Liu, E.¹ Cohen, M.L.²

11
- 0004244010
- Oxford University Press, New York
- (1989) Inorganic Chemistry , pp. 337
- Shriver, D.F.¹ Atkins, P.W.² Langford, C.H.³

12
- 0039694020
- SFV, Paris
- (1995) CIP 95 Proceedings Antibes, Le Vide: Sciences Technique et Applications , vol.275 , pp. 64
- Neuville, S.¹ Tagliaferro, A.² Bounouh, Y.³ Vallon, S.⁴ Etemadi, R.⁵ Perrin, J.⁶

13
- 0031246460
- Tribological properties of diamond-like carbon and related materials
- (1997) Surf. Coat. Technol , vol.94-95 , pp. 507
- Grill, A.¹

14
- 0004076374
- R.E. Clausing, L.L. Horton, J.C. Angus, P. Koidl (Eds.), Plenum Press, New York
- (1991) Diamond and Diamond Like Films and Coatings
- Koidl, P.¹ Wild, C.² Lacher, R.³ Sah, R.F.⁴

15
- 36448998904
- (1994) J. Appl. Phys , vol.75 , pp. 7718
- Keudell, A.V.¹ Möller, J.²

16
- 0031245658
- (1997) Surf. Coat. Technol , vol.94-95 , pp. 549-554
- Ramirez, A.G.¹ Sinclair, R.²

17
- 8744247485
- (2001) Surf. Coat. Technol , vol.146 , pp. 292
- Erdemir, A.¹

18
- 2142842808
- Heidelberg 1992, Diamond Relat. Mater
- (1993) Proceedings of the Third International Conference on the New Diamond Science and Technology
- Eskilden, S.S.¹ Bienk, E.J.² Hausen, J.B.³

19
- 0031247829
- (1997) Surf. Coat. Technol , vol.94-95 , pp. 555-560
- Rats, D.¹ Vandenbulcke, L.² Boher, C.³ Farges, G.⁴

20
- 0026208238
- (1991) Diamond Relat. Mater , vol.1 , pp. 51
- McKenzie, D.R.¹ Müller, D.² Pailthorpe, B.A.³

21
- 2142784776
- Heidelberg, 1992, Diamond Relat. Mater
- (1993) Proceedings of the Third International Conference on the New Diamond Science and Technology
- Askenov, I.I.¹ Mksimov, M.G.² Palij, Y.Y.³ Strel'nitskij, V.E.⁴

22
- 0001226918
- (1992) J. Appl. Phys , vol.72 , Issue.3 , pp. 1149
- Silva, S.R.¹ Amaratunga, G.A.J.² Constatinou, C.P.³

23
- 50749133192
- (1992) Diamond Relat. Mater , vol.1 , pp. 929
- Yugo, S.¹ Kanai, T.² Kimura, T.³

24
- 0041740620
- (1991) Appl. Phys. Lett , vol.58 , Issue.5 , pp. 466
- Cuomo, J.J.¹ Doyles, J.P.² Bruley, J.³ Liu, J.C.⁴

25
- 2142734190
- Les Editions de la Physique ZI. Courtaboeuf F-Les Ulis, France
- (1988) Amorphous Hydrogenated Carbon Films, EMRS Meeting Strasbourg XVII , pp. 259
- Robertson, J.¹ O'Really, C.P.²

26
- 0032482916
- (1998) Surf. Coat. Technol , vol.106 , pp. 277
- Neuville, S.¹

27
- 0026371298
- (1991) Surf. Coat. Technol , vol.49 , pp. 519-529
- Knight, J.C.¹ Page, T.F.² Chandler, H.W.³

28
- 0026820989
- (1992) Thin Solid Films , vol.208 , pp. 42
- Martinu, L.¹ Raveh, A.² Domingue, A.³ Bertrand, L.⁴ Kernberg-Sapiela, J.E.⁵ Wertheimer, M.R.⁶

29
- 36549090998
- (1987) J. Appl. Phys , vol.61 , pp. 2509
- Ishikawa, J.¹ Takeiri, Y.² Ogawa, K.³ Tagaki, T.⁴

30
- 2142782231
- (1995) Report TU Eindhoven VDF/NT 95/15
- Kleuskens, P.¹

31
- 0001080152
- (1992) Diamond Relat. Mater , vol.1 , pp. 1021
- Bachman, P.K.¹ van Eckervort, W.²

32
- 2142776009
- (1990) J. Mater. Res , vol.5 , pp. 2483
- Nimmagadda, R.R.¹ Joshi, A.² Hsu, W.L.³

33
- 0010910419
- (1998) Surf. Coat. Technol
- Cheng, Y.¹ Xu, D.² Wu, Y.³ Chen, J.⁴ Qiao, X.⁵ Xie, C.⁶

34
- 84953680275
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 2459
- Windishman, H.¹

35
- 0020194632
- (1982) Thin Solid Films , vol.96 , pp. 31
- Weissmantel, C.¹ Bewiloga, K.² Breuer, K.³

36
- 0346350553
- Les Editions de la Physique Z.I. Courtaboeuf F-Les Ulis, France
- (1988) Amorphous Hydrogenated Carbon Films, EMRS Meeting Strasbourg XVII , pp. 117
- Enke, K.¹

37
- 0003501942
- SFV, Paris
- (1996) Reactive Plasmas
- Ricard, A.¹

38
- 2142778460
- SFV, Paris
- (1997) CIP Antibes (1995), Conference Proceedings, Le Vide: Sciences, Technique et Applications , vol.284 , pp. 353
- Etemadi, R.¹ Godet, C.² Perrin, J.³

39
- 36448999454
- (1993) J. Appl. Phys , vol.74 , Issue.11 , pp. 6538
- Kushner, M.J.¹

40
- 84881163328
- (1991) J. Vac. Sci. Technol. B , vol.9 , Issue.1 , pp. 8
- Moisan, M.¹ Barbeau, C.² Claude, R.³

41
- 3943068908
- (1995) Plasma Source Sci. Technol
- Garscadden, A.¹ Nagpal, R.²

42
- 0031122385
- (1997) CIP 97 Le Mans, Conference Proceedings, Le Vide: Sciences, Technique et Applications , vol.284 , pp. 353
- Neuville, S.¹

43
- 0000653389
- (1992) Phys. Rev. B , vol.45 , pp. 14364
- Demichelis, F.¹ Pirri, C.F.² Tagliaferro, A.³

44
- 2142668756
- Centre de Recherche des Plasmas
- (1993) Rapport TP4 Ecole Polytechnique de Lausanne (CH)
- Gay, P.¹

45
- 3643090763
- (1969) Phys. Rev , vol.184 , pp. 383
- Sigmund, P.¹

46
- 36049052840
- (1969) Phys. Rev , vol.187 , pp. 768
- Sigmund, P.¹

47
- 2142668757
- Ph.D. Thesis, Technische Universiteit, Delft
- (1991)
- Manenshijn, A.¹

48
- 0000864816
- (1992) Diamond Relat. Mater , vol.1 , pp. 316
- Ehrhardt, H.¹ Kleber, R.² Krüger, A.³

49
- 4243355330
- Ph.D. Thesis, Ecole Polytechnique Palaiseau, France
- (1992)
- Böhm, C.¹

50
- 0346974565
- (1991) Prog. Solid Stat. Chem , vol.21 , pp. 199
- Robertson, J.¹

51
- 21544438866
- Characterization of diamond like carbon by infrared spectroscopy
- (1992) Appl. Phys. Lett , vol.60 , pp. 2089
- Grill, A.¹ Patel, V.²

52
- 2142681177
- Ph.D. Thesis, University of Paris VI
- (1993)
- Bounouh, Y.¹

53
- 21544483271
- (1991) Appl. Phys. Lett , vol.58 , pp. 592
- Tamor, M.A.¹ Vassell, W.C.² Carduner, K.R.³

54
- 2142783465
- Les Editions de la Physique Les, Ulis, France
- (1987) EMRS Meeting Strasbourg XVII , pp. 351
- Vietzke, E.¹ Philipps, V.² Flashkamp, K.³ Wild, C.⁴

55
- 0026809156
- (1992) Diamond Relat. Mater , vol.1 , pp. 538
- Serra, C.¹ Pascual, E.² Maas, F.³ Bertran, E.⁴ Esteve, J.⁵

56
- 21544480383
- (1989) J. Appl. Phys , vol.65 , Issue.12 , pp. 5142
- Frenklach, M.¹

57
- 0010852429
- (1992) Diamond Relat. Mater , vol.1 , pp. 121
- Weiler, M.¹ Kleber, R.² Jung, K.³ Ehrhardt, H.⁴

58
- 0345906710
- (1981) J. Cryst. Growth , vol.52 , pp. 219
- Spitsyn, V.¹ Bouilov, L.L.² Derjaguin, D.V.³

59
- 2142849223
- France Diamond Relat. Mater
- (1997) Proceedings Diamond 96 Tours
- Baldwin, S.K.¹ Owano, J.T.G.² Zhao, M.³ Kruger, C.H.⁴

60
- 0026809078
- (1992) Diamond Relat. Mater , vol.1 , Issue.5-6 , pp. 492
- Chung, C.P.¹ Shih, H.C.² Chen, J.G.³ Tang, Y.S.⁴ Fan, W.L.⁵

61
- 0000976301
- (1995) J. Appl. Phys , vol.78 , Issue.9 , pp. 5837
- Kopponen, I.¹ Hakorvrta, M.² Lappalainen, R.³

62
- 2142788501
- Les Editions de la Physique, Les Ulis, France
- (1987) EMRS Strasbourg Meeting XVII , pp. 117
- Vedovotto, N.¹ Mackowski, J.M.² Pignard, R.³ Cornil, E.⁴ Collardelle, P.⁵

63
- 2142732980
- (2000) Thin Solid Films , vol.230 , pp. 150
- Luby, S.¹ Majkova, E.² Jergel, M.³

64
- 2142669970
- 17 July
- (1997) Patent INPI No. 95 13088
- Neuville, S.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.