Deposition of Ti-containing diamond-like carbon (DLC) films by PECVD technique

Materials Science and Engineering C

Volumn 27, Issue 5-8 SPEC. ISS., 2007, Pages 1328-1330

  Caschera, D ^a   Federici, F ^a   Kaciulis, S ^a   Pandolfi, L ^a   Cusma A ^a   Padeletti, G ^a  

^a CNR   (Italy)

Author keywords

Coating; DLC; Nanocomposite; PECVD; Titanium carbide

Indexed keywords

HYDROGENATION; MAGNETRON SPUTTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THERMODYNAMIC STABILITY; TITANIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL-PHYSICAL CHARACTERIZATION; METAL PRECURSOR; TITANIUM ISOPROPOXIDE;

DIAMOND LIKE CARBON FILMS;

EID: 34547650961     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2006.06.027     Document Type: Article

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