Hard hydrogenated carbon films with low stress

Applied Physics Letters

Volumn 73, Issue 5, 1998, Pages 617-619

  Lacerda, R G ^a   Marques, F C ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000696411     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121874     Document Type: Article

References (28)

1. D. F. Franceschini, C. A. Achete, and F. L. Freire, Jr., Appl. Phys. Lett. 60, 3229 (1992).
2. M. Chhowalla, Y. Yin, G. A. J. Amaratunga, D. R. McKenzie, and T. Frauenheim, Appl. Phys. Lett. 69, 2344 (1996).
3. R. W. Hoffman, in Physics of Thin Films, edited by G. Hass and R. E. Thun (Academic, New York, 1996), Vol. 3.
4. X. Jiang, K. Reichelt, and B. Stritzker, J. Appl. Phys. 66, 5805 (1989).
5. Y. Lifshitz, S. R. Kasi, and J. W. Rabalais, Phys. Rev. Lett. 68, 620 (1989);
6. Y. Lifshitz, S. R. Kasi, and J. W. Rabalais, Phys. Rev. B 41, 10468 (1990).
7. D. R. McKenzie, D. Muller, and B. A. Pailthorpe, Phys. Rev. Lett. 67, 773 (1991).
8. P. J. Fallon, V. S. Veerasamy, C. A. Davis, J. Robertson, G. A. J. Amaratunga, W. I. Milne, and J. Koskinen, Phys. Rev. B 48, 4777 (1993).
9. M. Weiler, S. Sattel, K. Jung, H. Ehrhardt, V. S. Veerasamy, and J. Robertson, Appl. Phys. Lett. 64, 2797 (1994).
10. J. Robertson, Diamond Relat. Mater. 2, 984 (1993).
11. C. A. Davis, Thin Solid Films 226, 30 (1993).
12. K. Kohler, J. W. Coburn, D. E. Horne, and E. Kay, J. Appl. Phys. 57, 59 (1985).
13. B. Chapman, Glow Discharge Process (Wiley, New York, 1980).
14. W. Moller, Appl. Phys. A: Solids Surf. 56, 527 (1993).
15. R. Kleber, M. Weiler, A. Kruger, S. Sattel, G. Kunz, K. Jung, and H. Ehrbardt, Diamond Relat. Mater. 2, 246 (1993).
16. J. Robertson, Phys. Rev. Lett. 68, 220 (1992).
17. M. A. Tamor, W. C. Vassell, and K. R. Carduner, Appl. Phys. Lett. 58, 592 (1991).
18. J. K. Walters, P. J. R. Honeybone, D. W. Huxley, R. Newport, and W. S. Howells, Phys. Rev. B 50, 831 (1994).
19. U. Stephan, T. Frauenheim, P. Blaudeck, and G. Jungnickel, Phys. Rev. B 49, 1489 (1994).
20. J. Robertson, J. Non-Cryst. Solids 198-200, 614 (1996);
21. Diamond Relat. Mater. 6, 212 (1997).
22. J. Schwan, S. Ulrich, V. Batori, H. Ehrhardt, and S. R. P. Silva, J. Appl. Phys. 80, 440 (1996).
23. M. Tamor and W. Vassel, J. Appl. Phys. 76, 446 (1994).
24. S. Prawer, K. W. Nugent, Y. Lifshitz, G. D. Lampert, E. Grossman, J. Kulik, and R. Kalish, Diamond Relat. Mater. 5, 433 (1996).
25. J. Robertson, Pure Appl. Chem. 66, 1789 (1994).
26. J. Robertson, Surf. Coat. Technol. 50, 185 (1992).
27. P. C. Kelires, Phys. Rev. Lett. 73, 2460 (1994).
28. G. A. J. Amaratunga, M. Chhowalla, C. J. Kiely, I. Alexandrou, and R. M. Devenish, Nature (London) 383, 321 (1996).