Incidence angle effect of energetic carbon ions on deposition rate, topography, and structure of ultrathin amorphous carbon films deposited by filtered cathodic vacuum Arc

IEEE Transactions on Magnetics

Volumn 48, Issue 7, 2012, Pages 2220-2227

  Wang, N ^a   Komvopoulos, K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Amorphous carbon; filtered cathodic vacuum arc; hybridization; structure; surface topography; ultrathin films

Indexed keywords

A-C FILM; AFM; AMORPHOUS CARBON (A-C); CARBON BONDING; CARBON IONS; DEPTH PROFILE; FILTERED CATHODIC VACUUM ARC; HYBRIDIZATION; INCIDENCE ANGLES; MONTE CARLO SIMULATION; SURFACE NORMALS; TETRAHEDRAL CARBON; ULTRA-THIN; ULTRAHIGH DENSITY;

AMORPHOUS CARBON; ATOMIC FORCE MICROSCOPY; CARBON FILMS; MONTE CARLO METHODS; PHOTOELECTRONS; STRUCTURE (COMPOSITION); SURFACE ROUGHNESS; SURFACE TOPOGRAPHY; TRANSMISSION ELECTRON MICROSCOPY; ULTRATHIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

TOPOGRAPHY;

EID: 84863005495     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2012.2190295     Document Type: Article

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