TRIM-DYNAMIC applied to marker broadening and SIMS depth profiling

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 153, Issue 1-4, 1999, Pages 398-409

  Biersack, Jochen ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIMONY; ARGON; COMPUTER SIMULATION; ION IMPLANTATION; SECONDARY ION MASS SPECTROMETRY; SILICON; THIN FILMS;

COLLISIONAL MIXING; DEPTH PROFILING; THIN METAL MARKERS; TRIM DYNAMIC COMPUTER PROGRAM;

MOLECULAR DYNAMICS;

EID: 0033516055     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)01029-5     Document Type: Article

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