![]() |
Volumn 10, Issue 2, 2001, Pages 139-144
|
Intrinsic stress and stiffness variations in amorphous carbon
a
|
Author keywords
Intrinsic stress; Tetrahedral amorphous carbon; Variation of stiffness
|
Indexed keywords
ANNEALING;
CARBON;
COMPUTER SIMULATION;
DEPOSITION;
FILM GROWTH;
MONTE CARLO METHODS;
RELAXATION PROCESSES;
STATISTICS;
STIFFNESS;
INTRINSIC STRESSES;
AMORPHOUS FILMS;
STRESS;
|
EID: 0035248132
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(00)00460-X Document Type: Article |
Times cited : (26)
|
References (32)
|