Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy

Surface and Coatings Technology

Volumn 201, Issue 16-17, 2007, Pages 7235-7240

  Liu, Fan Xin ^a   Yao, Kai Lun ^a,b,c   Liu, Zu Li ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b INTERNATIONAL CENTRE FOR MATERIALS PHYSICS   (China)

^c International Center of Science   (China)

Author keywords

Hardness; Internal stress; Raman spectra; Substrate tilting angle; Tetrahedral amorphous carbon films

Indexed keywords

AMORPHOUS FILMS; HARDNESS; MAGNETIC RECORDING; RAMAN SPECTROSCOPY; RESIDUAL STRESSES;

FILM FORMATION; SUBSTRATE TILTING; TETRAHEDRAL AMORPHOUS CARBON FILMS; TILTING ANGLE;

AMORPHOUS CARBON;

AMORPHOUS CARBON; AMORPHOUS FILMS; HARDNESS; MAGNETIC RECORDING; RAMAN SPECTROSCOPY; RESIDUAL STRESSES;

EID: 34047266219     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.01.030     Document Type: Article

References (22)

1. Robertson J. Thin Solid Films 383 (2001) 81
2. Robertson J. Mater. Sci. Eng., R Rep. 37 (2002) 129
3. Leo H.L., Chapman S.R., and Crone R.M. ASME J. Tribol. 117 (1995) 119
4. Kohira H., Prabhakaran V., and Talke F.E. Tribol. Int. 33 (2000) 315
5. Yen B.K., White R.L., Dai Q., Toney M.F., and York B.R. J. Vac. Sci. Technol. A, Vac. Surf. Films 21 6 (2003) 1895
6. Beghi M.G., Ferrari A.C., Teo K.B.K., and Robertson J. Appl. Phys. Lett. 81 20 (2002) 3804
7. Lacerda R.G., and Marques F.C. Appl. Phys. Lett. 73 5 (1998) 617
8. Durand-Drouhin O., Zeinert A., Benlahsen M., Zellama K., and Turban G. Diamond Relat. Mater. 9 (2000) 752
9. Gilkes K.W.R., Prawer S., Nugent K.W., Robertson J., and Sands H.S. J. Appl. Phys. 87 (2000) 7283
10. Tay B.K., Shi X., Tan H.S., Yang H.S., and Sun Z. Surf. Coat. Technol. 105 (1998) 155
11. Cheng Y.H., Tay B.K., Lau S.P., Shi X., and Qiao X.L. Appl. Phys., A Mater. Sci. Process. 73 (2001) 341
12. Gerstner E.G., Lukins P.B., McKenzie D.R., and McCulloch D.G. J. Vac. Sci. Technol. B, Microelectron. Nanometer Struct. Process. Meas. Phenom. 54 (1996) 14504
13. Field S.K., Jarratt M., and Teer D.G. Tribol. Int. 37 (2004) 949
14. Liu D.P., Benstetter G., and Lodermeier E. J. Vac. Sci. Technol. A, Vac. Surf. Films 21 5 (2003) 1665
15. Gradowski M.V., Ferrari A.C., Ohr R., Jacoby B., Hilgers H., Adrian H., et al. Surf. Coat. Technol. 174-175 (2003) 246
16. Polo M.C., Andujar J.L., Hart A., Robertson J., and Milne W.I. Diamond Relat. Mater. 9 (2000) 663
17. Akita N., Konishi Y., Ogura S., Imamura M., Hu Y.H., and Shi X. Diamond Relat. Mater. 10 (2001) 1017
18. Gilkes K.W.R., Sands H.S., and Robertson J. Appl. Phys. Lett. 70 15 (1997) 1980
19. Ferrari A.C. Diamond Relat. Mater. 11 (2002) 1053
20. Ferrari A.C., and Robertson J. Phys. Rev., B 61 20 (2000) 14095
21. Ferrari A.C., and Robertson J. Phys. Rev., B 64 7 (2001) 0754141-1-13
22. Zhang T.H., and Huan Y. Compos. Sci. Technol. 65 (2005) 1409