Angular dependence of sputtering yield of amorphous and polycrystalline materials

Journal of Physics D: Applied Physics

Volumn 41, Issue 17, 2008, Pages

  Wei, Qiangmin ^a   Li, Kun Dar ^a   Lian, Jie ^b   Wang, Lumin ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749108732     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/17/172002     Document Type: Article

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