Thickness dependence of the structure of diamond-like carbon films by Raman spectroscopy

Surface and Coatings Technology

Volumn 203, Issue 13, 2009, Pages 1829-1832

  Liu, Fan Xin ^a   Wang, Zhen Lin ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

Diamond like carbon (DLC) films; Raman spectra; Thickness

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; DIAMOND LIKE CARBON FILMS; DIAMONDS; FILM GROWTH; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SPECTRUM ANALYSIS; ULTRATHIN FILMS;

A-C:H FILMS; DIAMOND-LIKE CARBON (DLC) FILMS; ECR-CVD; FILM GROWTH MODES; FUNDAMENTAL LIMITATIONS; RAMAN SPECTRA; TA-C FILMS; THICKNESS; THICKNESS DEPENDENCES; THREE STAGES; TWO STAGES; UV-RAMAN SPECTROSCOPIES;

CARBON FILMS;

EID: 60949112942     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.01.008     Document Type: Article

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