Influence of the incident angle of energetic carbon ions on the properties of tetrahedral amorphous carbon (ta-C) films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 5, 2003, Pages 1665-1670

  Liu, Dongping ^a   Benstetter, Günther ^a   Lodermeier, Edgar ^a   Vancea, Johann ^b  

^a DEGGENDORF INSTITUTE OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF REGENSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; FRICTION; GRAPHITE;

INCIDENT ANGLE;

AMORPHOUS FILMS;

EID: 0142059011     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1597888     Document Type: Conference Paper

References (22)

1. A. Grill, Diamond Relat. Mater. 8, 428 (1999).
2. Y. Lifshitz, Diamond Relat. Mater. 8, 1659 (1999).
3. J. J. Cuomo, D. L. Pappas, J. Bruley, and J. P. Doyle, J. Appl. Phys. 70, 1706 (1991).
4. M. Chhowalla, J. Robertson, C. W. Chen, S. R. P. Silva, C. A. Davis, G. A. J. Amaratunga, and W. I. Milne, J. Appl. Phys. 81, 139 (1997).
5. M. C. Polo, J. L. Andujar, A. Hart, J. Robertson, and W. I. Milne, Diamond Relat. Mater. 9, 663 (2000).
6. J. J. Cuomo, D. L. Pappas, R. Lossy, J. P. Doyle, and J. Bruley, J. Vac. Sci. Technol. A 10, 3414 (1992).
7. A. Stanishevsky and E. Tochitsky, J. Chem. Vap. Deposition 4, 292 (1996).
8. A. Stanishevsky, Chaos, Solitons Fractals 10, 2045 (1999).
9. Z. Jiang, C.-J. Lu, D. B. Bogy, C. S. Bhatia, and T. Miyamoto, Thin Solid Films 258, 75 (1995).
10. V. Prabhakaran and F. E. Talke, Wear 243, 18 (2000).
11. P. Merel, M. Tabbal, M. Chaker, S. Moisa, and J. Margot, Appl. Surf. Sci. 136, 105 (1998).
12. E. Liu, B. Blanpain, and J. P. Celis, Wear 192, 141 (1996).
13. C. Mathew, G. M. McCelland, R. Erlandsson, and S. Chieng, Phys. Rev. Lett. 59, 1942 (1987).
14. M. Labardi, M. Allegrini, M. Salerno, C. Frediani, and C. Ascoli, Appl. Phys. A: Solids Surf. 59, 3 (1994).
15. K. Shimura and K. Baba, Jpn. J. Appl. Phys., Part 1 39, 626 (2000).
16. C. A. Davis, K. M. Knowles, and G. A. J. Amaratunga, Surf. Coat. Technol. 76-77, 316 (1995).
17. Handbook of Micro/Nanotribology, edited by B. Bhushan (CRC, Boca Raton, FL, 1995), p. 323.
18. A. Zangwill, Physics at Surfaces (Cambridge University Press, Cambridge, U.K., 1988), p. 21.
19. D. C. Reigada, R. Prioli, L. G. Jacobsohn, and F. L. Freire, Jr., Diamond Relat. Mater. 9, 489 (2000).
20. L. V. Santos, V. J. Trava-Airoldi, J. Iha, E. J. Corat, and M. C. Salvadori, Diamond Relat. Mater. 10, 1049 (2001).
21. C. D. Marino, F. Demichelis, A. Tagliaferro, M. Patrini, A. Rizzi, M. Fontaine, and J. M. Layet, Diamond Relat. Mater. 4, 996 (1995).
22. J. Robertson, Pure Appl. Chem. 66, 1789 (1994).