Transmission electron microscopy and electron energy loss spectroscopy analysis of ultrathin amorphous carbon films

Journal of Materials Research

Volumn 19, Issue 7, 2004, Pages 2131-2136

  Wan, D ^a   Komvopoulos, K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; AMORPHOUS FILMS; DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; FILM GROWTH; INTERFACES (MATERIALS); MICROSTRUCTURE; NUCLEATION; SILICON CARBIDE; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY; ULTRATHIN FILMS;

AMORPHOUS CARBON; FILM DEPOSITION; RADIO FREQUENCY SPUTTERING; ULTRATHIN INTERFACE LAYER;

CARBON;

EID: 4143073618     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2004.0272     Document Type: Article

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