Effect of impact angle and substrate roughness on growth of diamondlike carbon films

Journal of Applied Physics

Volumn 101, Issue 1, 2007, Pages

  Ma, Tianbao ^a   Hu, Yuanzhong ^a   Wang, Hui ^a   Li, Xin ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FILM GROWTH; MOLECULAR DYNAMICS; SUBSTRATES; SURFACE ROUGHNESS;

FILM RELAXATION; IMPACT ANGLES; MOLECULAR DYNAMICS SIMULATIONS;

DIAMOND LIKE CARBON FILMS;

EID: 33846282360     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2404783     Document Type: Article

References (19)

1. J. Robertson, Thin Solid Films 383, 81 (2001).
2. C. Casiraghi, A. C. Ferrari, R. Ohr, D. Chu, and J. Robertson, Diamond Relat. Mater. 13, 1416 (2004).
3. P. J. Fallon, Phys. Rev. B 48, 4777 (1993).
4. Y. Lifshitz, Diamond Relat. Mater. 5, 388 (1996).
5. T. B. Ma, Y. Z. Hu, and H. Wang, Acta Phys. Sin. 55, 2922 (2006).
6. H. U. Jager and K. Albe, J. Appl. Phys. 88, 1129 (2000).
7. M. Kaukonen and R. M. Nieminen, Phys. Rev. B 61, 2806 (2000).
8. D. P. Liu, G. Benstetter, E. Lodermeier, and J. Vancea, J. Vac. Sci. Technol. A 21, 1665 (2003).
9. C. Casiraghi, A. C. Ferrari, R. Ohr, A. J. Flewitt, D. P. Chu, and J. Robertson, Phys. Rev. Lett. 91, 226104 (2003).
10. D. W. Brenner, O. A. Shenderova, and J. A. Harrison, J. Phys.: Condens. Matter 14, 783 (2002).
11. D. W. Brenner, Phys. Rev. B 42, 9458 (1990).
12. Y. H. Hu and S. B. Sinnott, J. Comput. Phys. 200, 251 (2004).
13. M. P. Allen and D. J. Tildesley, Computer Simulation of Liquids (Clarendon, Oxford, 1989).
14. T. B. Ma, Y. Z. Hu, and H. Wang, Acta Phys. Sin. (in press).
15. Y. Lifshitz, Phys. Rev. Lett. 62, 1290 (1989).
16. C. A. Davis, Thin Solid Films 226, 30 (1993).
17. J. Robertson, Diamond Relat. Mater. 2, 984 (1993).
18. C. Weissmantel, Thin Films From Free Atoms and Particles (Academic, Orlando, 1985).
19. M. C. Salvadori, D. R. Martins, and M. Cattani, Surf. Coat. Technol. 200, 5119 (2006).