Nano characterization of materials

ECS Transactions

Volumn 33, Issue 11, 2010, Pages 3-22

  Schroder, Dieter K ^a  

^a Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON HOLOGRAPHY; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; PROBES; SECONDARY ION MASS SPECTROMETRY; TOMOGRAPHY;

CHARACTERIZATION TECHNIQUES; DEVICE CHARACTERIZATION; DIMENSIONAL CHARACTERIZATION; FIELD ION MICROSCOPY; INTERFEROMETRIC MICROSCOPY; LATERAL RESOLUTION; NANO-CHARACTERIZATION; VERTICAL RESOLUTION;

IONS;

EID: 84857433959     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3485679     Document Type: Conference Paper

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