Invited review article: Atom probe tomography

Review of Scientific Instruments

Volumn 78, Issue 3, 2007, Pages

  Kelly, Thomas F ^a   Miller, Michael K ^b  

^a Imago Scientific Instruments   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOM PROBE TOMOGRAPHY; SPATIAL RESOLUTION; STRUCTURAL ALLOYS; THIN MULTILAYER FILMS;

CERAMIC MATERIALS; DATA ACQUISITION; DIELECTRIC FILMS; MULTILAYER FILMS; SEMICONDUCTOR DEVICES; STRUCTURAL METALS; THIN FILMS;

TOMOGRAPHY;

EID: 34047158735     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2709758     Document Type: Review

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