SCOPUS 정보 검색 플랫폼

ECS Transactions

Volumn 11, Issue 3, 2007, Pages 233-242

Electron holography as characterization tool for 2-D analysis of p-n junctions

(5) Gribelyuk, M A a Domenicucci, A G a Ronsheim, P A a McMurray, J S a Gluschenkov, O a

a IBM (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON HOLOGRAPHY; ELECTRONS; FAILURE (MECHANICAL); FAILURE ANALYSIS; HOLOGRAMS; LASER RECORDING; SEMICONDUCTOR LASERS; SEMICONDUCTOR MATERIALS;

CHARACTERIZATION TOOLS; DOPANT DIFFUSION; ELECTRON HOLOGRAMS; INTEGRATION SCHEME; PHYSICAL FAILURE ANALYSIS; PROCESS INTEGRATION; QUANTITATIVE INFORMATION; SOI STRUCTURE;

SEMICONDUCTOR JUNCTIONS;

EID: 45249106374 PISSN: 19385862 EISSN: 19386737 Source Type: Conference Proceeding
DOI: 10.1149/1.2778667 Document Type: Conference Paper

Times cited : (1)

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