Soft X-ray microscopy at a spatial resolution better than 15 nm

Nature

Volumn 435, Issue 7046, 2005, Pages 1210-1213

  Chao, Weilun ^a,b   Harteneck, Bruce D ^a   Liddle, J Alexander ^a   Anderson, Erik H ^a   Attwood, David T ^a,b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENVIRONMENTAL IMPACT; NANOSTRUCTURED MATERIALS; PHOTONS; RESONANCE; X RAY MICROSCOPES;

BIOLOGICAL IMAGING; CHEMICAL IDENTIFICATION; PHYSICAL SCIENCES; X-RAY MICROSCOPY;

IMAGING TECHNIQUES;

ALUMINUM; CARBON; COBALT; IRON; NANOPARTICLE; NICKEL; NITROGEN; SILICON; TITANIUM; WATER;

RESOLUTION; X-RAY;

ACCURACY; ARTICLE; CRYOBIOLOGY; DEVICE; ELECTRONICS; ENERGY; MAGNETISM; MICROSCOPY; PHOTON; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SOFT X RAY MICROSCOPY; THREE DIMENSIONAL IMAGING; X RAY ANALYSIS;

BIOLOGICAL SCIENCES; MAGNETICS; MICROCHIP ANALYTICAL PROCEDURES; MICROSCOPY; MICROSCOPY, ELECTRON, SCANNING; NANOSTRUCTURES; PHOTONS; SENSITIVITY AND SPECIFICITY; SILICON; WATER; X-RAYS;

EID: 21744452342     PISSN: 00280836     EISSN: None     Source Type: Journal    
DOI: 10.1038/nature03719     Document Type: Article

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