Transparent film profiling and analysis by interference microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7064, Issue , 2008, Pages

  De Groot, Peter J ^a   De Lega, Xavier Colonna ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

Interferometry; Microscopy; Thin films; White light

Indexed keywords

FILM PREPARATION; INTERFEROMETRY; MICROSCOPIC EXAMINATION; MULTILAYER FILMS; OPTICAL MULTILAYERS; OPTICAL PROPERTIES; TOPOGRAPHY;

ANALYSIS TECHNIQUES; INSTRUMENT PLATFORMS; INTERFERENCE MICROSCOPY; THICKNESS PROFILES; TOPOGRAPHY MEASUREMENT; TRANSPARENT FILMS; WHITE LIGHT; WHITE-LIGHT INTERFEROMETER;

THIN FILMS;

EID: 52249088177     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.794936     Document Type: Conference Paper

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