Excitation Mechanisms and Sheath Dynamics in Capacitively Coupled Radio-Frequency Oxygen Plasmas

Contributions to Plasma Physics

Volumn 50, Issue 10, 2010, Pages 942-953

  Dittmann, K ^a   Matyash, K ^b   Nemschokmichal, S ^a   Meichsner, J ^a   Schneider, R ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

Excitation mechanisms; Oxygen; PIC MCC simulations; PROES; RF discharges; Sheath dynamics

Indexed keywords

ELECTRIC DISCHARGES; EXCITED STATES; MOLECULAR OXYGEN; OPTICAL EMISSION SPECTROSCOPY; PHOTODISSOCIATION; POSITIVE IONS; RADIO WAVES;

CAPACITIVELY COUPLED; EXCITATION MECHANISMS; EXCITATION PATTERN; EXCITATION RATE; PHASE RESOLVED OPTICAL EMISSION SPECTROSCOPY; PIC-MCC SIMULATION; RADIO FREQUENCY OXYGEN PLASMA; RF DISCHARGE; SHEATH DYNAMICS; SPATIOTEMPORAL BEHAVIORS;

ELECTRODES;

EID: 78449313629     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.201000038     Document Type: Article

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