Glow discharge optical emission spectroscopy for accurate and well resolved analysis of coatings and thin films

Thin Solid Films

Volumn 520, Issue 5, 2011, Pages 1660-1667

  Wilke, Marcus ^a,c   Teichert, Gerd ^a   Gemma, Ryota ^b   Pundt, Astrid ^b   Kirchheim, Reiner ^b   Romanus, Henry ^c   Schaaf, Peter ^a,c  

^a Testing Center for Thin Films and Materials Properties   (Germany)

^b UNIVERSITY OF GÖTTINGEN   (Germany)

^c ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Elemental depth profiles; GDOES; Glow discharge optical emission spectroscopy; MAX phase; Thick coatings; Thin film analysis; Thin films and coatings

Indexed keywords

DEPTH PROFILE; GDOES; GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY; MAX PHASE; THICK COATINGS; THIN FILM ANALYSIS; THIN FILMS AND COATINGS;

CHEMICAL ELEMENTS; CORROSION RESISTANCE; DEPTH PROFILING; EMISSION SPECTROSCOPY; EROSION; FILM PREPARATION; GLOW DISCHARGES; HYDROGEN; LIGHT EMISSION; MULTILAYERS; OPTICAL EMISSION SPECTROSCOPY; PROTECTIVE COATINGS; PULSED LASER DEPOSITION; SENSITIVITY ANALYSIS; SILICON CARBIDE; SPECTROMETRY; STOICHIOMETRY; VAPOR DEPOSITION; ZINC COATINGS;

ALUMINUM COATINGS;

EID: 82755182776     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.07.058     Document Type: Conference Paper

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