Decrease of water vapor desorption by Si film coating on stainless steel

Vacuum

Volumn 53, Issue 1-2, 1999, Pages 281-284

  Inayoshi, S S ^a   Tsukahara, S ^a   Kinbara, A ^b  

^a ULVAC INC   (Japan)

^b KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DEGASSING; SILICON; STAINLESS STEEL; SURFACE TREATMENT; TEMPERATURE PROGRAMMED DESORPTION;

OUTGASSING RATE; SILICON FILM;

DESORPTION;

EID: 0033132683     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00375-3     Document Type: Article

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