Modelling of Glow Discharge Optical Emission Spectroscopy depth profiles of metal (Cr,Ti) multilayer coatings

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 63, Issue 3, 2008, Pages 422-430

  Escobar Galindo, R ^a   Albella, J M ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

Depth profile; GDOES; Multilayer; Simulation

Indexed keywords

COATINGS; METAL ANALYSIS; MULTILAYERS; OPTICAL EMISSION SPECTROSCOPY;

DEPTH PROFILE; GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY (GDOES);

GLOW DISCHARGES;

EID: 39149128262     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2007.12.006     Document Type: Article

References (45)

1. Sproul W.D. New routes in the preparation of mechanically hard films. Science 273 (1996) 889-892
2. Veprek S., Veprek-Heijman M.G.J., Karvankova P., and Prochazka J. Different approaches to superhard coatings and nanocomposites. Thin Solid Films 476 (2005) 1-29
3. Zhang S., Sun D., Fu Y., and Du H. Toughening of hard nanostructural thin films: a critical review. Surf. Coat. Technol. 198 (2005) 2-8
4. Musil J. Hard and superhard nanocomposite coatings. Surf. Coat. Technol. 125 (2000) 322-330
5. Parkin S.S.P. Spin-polarized current in spin valves and magnetic tunnel junctions. MRS Bull. 31 (2006) 389-394
6. Osaka T., Takano N., and Yokoshima T. Microfabrication of electro- and electroless-deposition and its application in the electronic field. Surf. Coat. Technol. 169-170 (2003) 1-7
7. Braüer G. Large area glass coating. Surf. Coat. Technol. 112 (1999) 358-365
8. Constantin R., and Miremad B. Performance of hard coatings, made by balanced and unbalanced magnetron sputtering, for decorative applications. Surf. Coat. Technol. 120-121 (1999) 728-733
9. Suzui M., Tokito S., and Taga Y. Review of thin film technology in automobile industry. Mater. Sci. Eng., B 51 (1998) 66-71
10. Taga Y. Review of thin film technology in automobile industry. Surf. Coat. Technol. 112 (1999) 339-346
11. In: Payling R., Jones D., and Bengtson A. (Eds). Glow Discharge Optical Emission Spectrometry (1997), John Wiley & Sons
12. Winchester M.R., and Payling R. Radio-frequency glow discharge spectrometry: a critical review. Spectrochim. Acta Part B 59 (2004) 607-666
13. Teo W.B., and Hirokawa K. Depth analysis of electrodeposited iron-nickel and copper-zinc alloy coatings by glow-discharge emission-spectroscopy. Surf. Interface Anal. 11 (1988) 533-538
14. Teo W.B., and Hirokawa K. Depth analysis of metal coatings by glow discharge spectrometry with an argon helium gas mixture. Surf. Interface Anal. 14 (1989) 143-152
15. Weiss Z. Depth analysis of nickel thin films on silicon by glow discharge spectroscopy: The interface region. Surf. Interface Anal. 15 (1990) 775-780
16. Weiss Z. Quantitative-evaluation of depth profiles analyzed by glow discharge optical emission spectroscopy: analysis of diffusion processes. Spectrochim. Acta Part B 47 (1992) 859-876
17. Oswald S., and Baunack S. Comparison of depth profiling techniques using ion sputtering from the practical point of view. Thin Solid Films 425 (2003) 9-19
18. Pisonero J., Fernández B., Pereiro R., Bordel N., and Sanz-Medel A. Glow-discharge spectrometry for direct analysis of thin and ultra-thin solid films. TrAC, Trends Anal. Chem. 25 (2006) 11-18
19. Pisonero J. Glow discharge spectroscopy for depth profile analysis: from micrometer to sub-nanometer layers. Anal. Bioanal. Chem. 384 (2006) 47-49
20. Hoffmann V., Dorka R., Wilken L., Hodoroaba V.D., and Wetzig K. Present possibilities of thin-layer analysis by GDOES. Surf. Interface Anal. 35 7 (2003) 575-582
21. Weiss Z. In: Payling R., Jones D.G., and Bengston A. (Eds). Glow Discharge Optical Emission Spectroscopy (1997), John Wiley & Sons Section 7.5
22. Escobar Galindo R., Forniés E., and Albella J.M. Interfacial effects during the analysis of multilayer metal coatings by radio-frequency glow discharge optical emission spectroscopy - Part 1. Crater shape and sputtering rate effects. J. Anal. At. Spectrom. 20 (2005) 1108-1115
23. Angeli J., Bengston A., Bogaerts A., Hoffmann V., Hodoroaba V., and Steers E. Glow discharge optical emission spectrometry: moving towards reliable thin film analysis: a short review. J. Anal. At. Spectrom. 18 (2003) 670-679
24. + ions. Thin Solid Films 60 (1979) 201-211
25. Beck U., Reiners G., Wirth Th., Hoffmann V., and Präβler F. Multilayer reference coatings for depth profile standards. Thin Solid Films 290-291 (1996) 57-62
26. Thobor A., Rousselot C., and Mikhailov S. Depth profiles study of n(TiN/AlN) bilayers systems by GDOES and RBS techniques. Surf. Coat. Technol. 174-175 (2003) 351-359
27. Escobar Galindo R., Gago R., Forniés E., Muñoz-Martin A., and Climent Font A. Nanometric resolution in glow discharge optical emission spectroscopy and Rutherford backscattering spectrometry depth profiling of metal (Cr, Al) nitride multilayers. Spectrochim. Acta Part B 61 (2006) 545-553
28. Hofmann S. Quantitative depth profiling in surface analysis: a review. Surf. Interface Anal. 4 (1980) 148-160
29. Seah M.P., and Lea C. Depth resolution in composition profiles by ion sputtering and surface analysis for single-layer and multilayer structures on real substrates. Thin Solid Films, 81 (1981) 257-270
30. Hofmann S. Sputter depth profile analysis of interfaces. Rep. Prog. Phys. 61 (1998) 827-888
31. Shimizu K., Brown G.M., Habazaki H., Kobayashi K., Skeldon P., Thompson G.E., and Wood G.C. Glow discharge optical emission spectrometry (GDOES) depth profiling analysis of anodic alumina films: a depth resolution study. Surf. Interface Anal. 27 (1999) 24-28
32. Shimizu K., Brown G.M., Habazaki H., Kobayashi K., Skeldon P., Thompson G.E., and Wood G.C. Impurity distributions in barrier anodic films on aluminium: a GDOES depth profiling study. Electrochim. Acta 44 (1999) 2297-2306
33. Shimizu K., Habazaki H., Skeldon P., Thompson G.E., and Marcus R.K. Influence of interfacial depth on depth resolution during GDOES depth profiling analysis of thin alumina films. Surf. Interface Anal. 31 (2001) 869-873
34. Bukaluk A. Influence of depth resolution on the interdifussion data in thin film bilayer and multilayer Ag/Pd structures. Vacuum 63 (2001) 119-126
35. Shimizu K., Habazaki H., Skeldon P., and Thompson G.E. Impact of RF-GD-OES in practical surface analysis. Spectrochim. Acta Part B 58 (2003) 1573-1583
36. Shimizu K., Habazaki H., Skeldon P., and Thompson G.E. Radiofrequency GDOES: a powerful technique for depth profiling analysis of thin films. Surf. Interface Anal. 35 (2003) 564-574
37. Hofmann S. Advances in sputter depth profiling using AES. Surf. Interface Anal. 35 (2003) 556-563
38. Wang J.Y., Hofmann S., Zalar A., and Mittenmeijer E.J. Quantitative evaluation of sputtering induced surface roughness in depth profiling of polycrystalline multilayers using Auger electron spectroscopy. Thin Solid Films 444 (2003) 120-124
39. Escobar Galindo R., Forniés E., and Albella J.M. Interfacial effects during the analysis of multilayer metal coatings by radio-frequency glow discharge optical emission spectroscopy - Part 2. Evaluation of depth resolution function and application to thin multilayer coatings. J. Anal. At. Spectrom. 20 (2005) 1116-1120
40. Hofmann S. In: Briggs D., and Seah M.P. (Eds). Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (1983), John Wiley & Sons Chap. 4
41. Hofmann S. Determination of depth resolution from measured sputtering profiles of multilayer structures: equations and approximations. Surf. Interface Anal. 8 (1986) 87-89
42. Oswald S., Hoffmann V., and Ehrlich G. Contributions to computer-aided interpretation of ion sputtering depth profiling. Spectrochim. Acta Part B 49 (1994) 1123-1145
43. Quentmeier A. In: Payling R., Jones D.G., and Bengston A. (Eds). Glow Discharge Optical Emission Spectroscopy (1997), John Wiley & Sons Section 7.3
44. Hofmann S. From depth resolution to depth resolution function: refinement of the concept for delta layers, single layers and multilayers. Surf. Interface Anal. 27 (1999) 825-834
45. Auger M.A., Gago R., Fernández M., Sánchez O., and Albella J.M. Deposition of TiN/Al bilayers on a rotating substrate by reactive sputtering. Surf. Coat. Technol. 157 (2002) 26-33