Quantitative depth profiling in glow discharge spectroscopies: A new deconvolution technique to separate effects of an uneven erosion crater shape

Fresenius' journal of analytical chemistry

Volumn 355, Issue 7-8, 1996, Pages 840-846

  Prassler, F ^a   Hoffmann, V ^a   Schumann, J ^a   Wetzig, K ^a  

^a IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; GLOW DISCHARGES; MATHEMATICAL MODELS; MULTILAYERS;

DECONVOLUTION; DEPTH PROFILE; EROSION SURFACE; MULTICOMPONENT ANALYSIS; PEAK RESOLUTION; QUANTITATIVE ANALYSIS;

EMISSION SPECTROSCOPY;

EID: 0030369908     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)