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Volumn 52, Issue 6 PART B, 1997, Pages 765-777

Calculation of crater profiles on a flat cathode in a direct current glow discharge

Author keywords

Crater profile; Direct current glow discharge; Monte Carlo modeling

Indexed keywords

CATHODES; DEPOSITION; GLOW DISCHARGES; MATHEMATICAL MODELS; MONTE CARLO METHODS; THREE DIMENSIONAL;

EID: 0031165781     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0584-8547(96)01623-0     Document Type: Article
Times cited : (44)

References (32)
  • 3
    • 0043019100 scopus 로고
    • Thin Film Analysis
    • R.K. Marcus (Ed.), Plenum Press, New York, Chapter 8
    • H. Hocquaux, Thin Film Analysis, in R.K. Marcus (Ed.), Glow Discharge Spectroscopies, Plenum Press, New York, 1993, Chapter 8.
    • (1993) Glow Discharge Spectroscopies
    • Hocquaux, H.1
  • 8
    • 0042100585 scopus 로고
    • Ph.D. Dissertation, University of Antwerp
    • C. Jonkers, Ph.D. Dissertation, University of Antwerp, 1995.
    • (1995)
    • Jonkers, C.1
  • 13
    • 0041599653 scopus 로고
    • Ph.D. Dissertation, University of Hohenheim
    • N. Jakubowski, Ph.D. Dissertation, University of Hohenheim, 1991.
    • (1991)
    • Jakubowski, N.1
  • 14
    • 0041599649 scopus 로고    scopus 로고
    • Idaho National Engineering Laboratory, Idaho Falls, ID, USA
    • SIMION, Software Version 4.0, Idaho National Engineering Laboratory, Idaho Falls, ID, USA.
    • SIMION, Software Version 4.0
  • 25
    • 0042601655 scopus 로고    scopus 로고
    • Ph.D. Dissertation, University of Antwerp
    • A. Bogaerts, Ph.D. Dissertation, University of Antwerp, 1996.
    • (1996)
    • Bogaerts, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.