Glow discharge as a tool for surface and interface analysis

Applied Spectroscopy Reviews

Volumn 41, Issue 3, 2006, Pages 227-258

  Nelis, Thomas ^a,b,d   Pallosi, Jozsef ^c  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b Atout and Progrès   (France)

^c Qualitest Lab Kft   (Hungary)

^d NONE   (France)

Author keywords

Depth profiling; Depth resolution; GD OES; GD ToF MS

Indexed keywords

BIOCOMPATIBILITY; COATINGS; DEPOSITION; DIFFUSION; ELECTROCHEMISTRY; HEAT TREATMENT; INTERFACES (MATERIALS); SPUTTERING;

ATOMIC-LAYER DEPTH RESOLUTION; COMPOSITIONAL DEPTH PROFILING (CDP); INTERFACE ANALYSIS; OPTICAL EMISSION SPECTROMETRY (OES);

MASS SPECTROMETRY;

EID: 33646020395     PISSN: 05704928     EISSN: 1520569X     Source Type: Journal    
DOI: 10.1080/05704920600620345     Document Type: Review

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