Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy

Surface and Coatings Technology

Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6185-6189

  Escobar Galindo, R ^a   Fornies E ^a   Albella, J M ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

Depth resolution; GDOES; Hard coatings; Interface; Multilayer

Indexed keywords

ALUMINUM NITRIDE; CHROMIUM COMPOUNDS; INTERFACES (MATERIALS); MULTILAYERS; NITRIDES; SPUTTERING; SURFACE ROUGHNESS; THIN FILMS; TITANIUM;

CHROMIUM NITRIDE MATRIX; CRATER GEOMETRY; DEPTH PROFILING; DEPTH RESOLUTION FUNCTION; METAL NITRIDE MULTILAYER COATINGS; RADIO-FREQUENCY GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY; THIN MULTILAYER COATINGS; ULTRATHIN MULTILAYER COATINGS;

COATINGS;

ALUMINUM NITRIDE; CHROMIUM COMPOUNDS; COATINGS; INTERFACES (MATERIALS); MULTILAYERS; NITRIDES; SPUTTERING; SURFACE ROUGHNESS; THIN FILMS; TITANIUM;

EID: 33646143008     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.064     Document Type: Article

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