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Volumn 252, Issue 1 SPEC. ISS., 2005, Pages 261-265
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Analysis of new electrical signals in respect to quantification of radio frequency glow discharge emission spectrometry
a
IFW DRESDEN
(Germany)
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Author keywords
Glow discharge; Optical emission spectroscopy; Plasma equivalent circuit; Radio frequency
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Indexed keywords
CHEMICAL ANALYSIS;
ELECTRIC CURRENTS;
ELECTRIC EXCITATION;
ELECTRIC POTENTIAL;
GLOW DISCHARGES;
LIGHT EMISSION;
SENSORS;
OPTICAL EMISSION SPECTROSCOPY;
PLASMA EQUIVALENT CIRCUITS;
RADIO FREQUENCY;
RF-GD-OES;
ELECTRIC SIGNAL SYSTEMS;
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EID: 24644473097
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2005.02.017 Document Type: Conference Paper |
Times cited : (7)
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References (11)
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