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Volumn 44, Issue 1, 2004, Pages 108-114
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Application of pulsed voltage to d.c. glow discharge plasma for controlling the sputtering rate in glow discharge optical emission spectrometry
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Author keywords
Chromium; Glow discharge optical emission spectrometry; Light modulation; Pulsed voltage; Sputtering rate; Steel
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Indexed keywords
CHROMIUM;
EMISSION SPECTROSCOPY;
LIGHT MODULATION;
OPTICAL RESOLVING POWER;
PLASMAS;
SIGNAL TO NOISE RATIO;
SPUTTERING;
STEEL;
GLOW DISCHARGE PLASMA;
OPTICAL EMISSION SPECTROMETRY;
PULSE VOLTAGE;
PULSED VOLTAGE;
GLOW DISCHARGES;
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EID: 1842684887
PISSN: 09151559
EISSN: None
Source Type: Journal
DOI: 10.2355/isijinternational.44.108 Document Type: Article |
Times cited : (10)
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References (18)
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