Nanometric resolution in glow discharge optical emission spectroscopy and Rutherford backscattering spectrometry depth profiling of metal (Cr, Al) nitride multilayers

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 61, Issue 5, 2006, Pages 545-553

  Escobar Galindo, R ^a   Gago, R ^b   Fornies E ^a   Munoz Martin A ^b   Climent Font, A ^b   Albella, J M ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^b CENTRO DE MICROANÁLISIS DE MATERIALES   (Spain)

Author keywords

Depth resolution; GDOES analysis; Multilayer; RBS analysis

Indexed keywords

ALUMINUM NITRIDE; CHROMIUM COMPOUNDS; GLOW DISCHARGES; MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTERING;

DEPTH RESOLUTION; GDOES ANALYSIS; RBS ANALYSIS;

EMISSION SPECTROSCOPY;

EID: 33746885191     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2006.03.012     Document Type: Article

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