The impact of molecular emission in compositional depth profiling using Glow Discharge-Optical Emission Spectroscopy

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 63, Issue 9, 2008, Pages 917-928

  Bengtson, Arne ^a  

^a SWEREA KIMAB   (Sweden)

Author keywords

Depth profiling; Glow discharge; Molecular emission

Indexed keywords

ATOMIC SPECTROSCOPY; CHEMICAL ELEMENTS; DEPTH PROFILING; DISCHARGE (FLUID MECHANICS); ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; FLUID MECHANICS; GLOW DISCHARGES; HYDROGEN; LIGHT EMISSION; MOLECULAR SPECTROSCOPY; NONMETALS; PHOTORESISTS; REAL TIME SYSTEMS; SPECTROSCOPY;

APPLICATIONS.; COMPOSITIONAL DEPTH PROFILING; CONTINUUM SPECTRUM; DIATOMIC MOLECULES; ELEMENTAL ANALYSIS; GLOW DISCHARGE; LIGHT ELEMENTS; MOLECULAR EMISSION; MOLECULAR EMISSIONS; OPTICAL EMISSIONS;

OPTICAL EMISSION SPECTROSCOPY;

EID: 50149109178     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2008.05.005     Document Type: Review

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