Controlling of material analysers of the GD-OES type with help of pump-down curves

Vacuum

Volumn 84, Issue 2, 2009, Pages 299-303

  Klemm, Denis ^a   Hoffmann, Volker ^a   Edelmann, Christian ^b  

^a IFW DRESDEN   (Germany)

^b Steinbeis Transfer Centre for Vacuum Science and Technology   (Germany)

Author keywords

Desorption; Evaluation; GD OES; GDOS; GDS; Pump curves

Indexed keywords

EVALUATION; GD-OES; GDOS; GDS; PUMP CURVES;

COMPUTER CONTROL SYSTEMS; DESORPTION; GLOW DISCHARGES; OPTICAL EMISSION SPECTROSCOPY; RELIABILITY ANALYSIS; SPECTROMETRY; SUBMARINE GEOPHYSICS;

PUMPS;

EID: 69349099910     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.06.058     Document Type: Article

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