SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 190, Issue 1, 2005, Pages 25-31

Supercritical fluid immersion deposition: A new process for selective deposition of metal films on silicon substrates

(5) Ye, Xiang R a,b Wai, Chien M a Lin, Yuehe b Young, James S b Engelhard, Mark H b

a UNIVERSITY OF IDAHO (United States)

b PACIFIC NORTHWEST NATIONAL LABORATORY (United States)

Author keywords

Copper; Immersion deposition; Palladium; Palladium silicide; Silicon substrates; Supercritical CO2

Indexed keywords

PALLADIUM COMPOUNDS; SILICON; SOLUTIONS; SOLVENTS; SUBSTRATES;

GALVANIC DISPLACEMENT; IMMERSION DEPOSITION; METAL FILMS; METAL IONS;

SUPERCRITICAL FLUIDS;

SUPERCRITICAL FLUID;

EID: 8144220467 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.06.023 Document Type: Article

Times cited : (16)

References (57)

1
- 0032631833
- S.W. Kang S.H. Han S.W. Rhee Thin Solid Films 350 1999 10
- (1999) Thin Solid Films , vol.350 , pp. 10
- Kang, S.W.¹ Han, S.H.² Rhee, S.W.³

2
- 0001462764
- H. Choi S. Hwang Chem. Mater. 10 1998 2326
- (1998) Chem. Mater. , vol.10 , pp. 2326
- Choi, H.¹ Hwang, S.²

3
- 0032669507
- N. Takano N. Hosoda T. Yamada T. Osaka J. Electrochem. Soc. 146 1999 1407
- (1999) J. Electrochem. Soc. , vol.146 , pp. 1407
- Takano, N.¹ Hosoda, N.² Yamada, T.³ Osaka, T.⁴

4
- 0033719981
- Y.Y. Shacham-Diamand Electrochem. Solid-State Lett. 3 2000 279
- (2000) Electrochem. Solid-State Lett. , vol.3 , pp. 279
- Shacham-Diamand, Y.Y.¹

5
- 33748589233
- E.A. Meulenkamp L.M. Peter J. Chem. Soc., Faraday Trans. 92 1996 4077
- (1996) J. Chem. Soc., Faraday Trans. , vol.92 , pp. 4077
- Meulenkamp, E.A.¹ Peter, L.M.²

6
- 0031100866
- J.A. Switzer C.J. Hung D.C. Van Aken Adv. Mater. 9 1997 334
- (1997) Adv. Mater. , vol.9 , pp. 334
- Switzer, J.A.¹ Hung, C.J.² Van Aken, D.C.³

7
- 8144229593
- J.A. Darr M. Poliakoff Chem. Rev. 99 1999 334
- (1999) Chem. Rev. , vol.99 , pp. 334
- Darr, J.A.¹ Poliakoff, M.²

8
- 0032955181
- F. Cansell B. Chevalier A. Demourgues J. Etourneau C. Even Y. Garrabos V. Pessey S. Petit A. Tressaud F. Weill J. Mater. Chem. 9 1999 67
- (1999) J. Mater. Chem. , vol.9 , pp. 67
- Cansell, F.¹ Chevalier, B.² Demourgues, A.³ Etourneau, J.⁴ Even, C.⁵ Garrabos, Y.⁶ Pessey, V.⁷ Petit, S.⁸ Tressaud, A.⁹ Weill, F.¹⁰

9
- 0037312436
- X.R. Ye C.M. Wai J. Chem. Educ. 80 2003 198
- (2003) J. Chem. Educ. , vol.80 , pp. 198
- Ye, X.R.¹ Wai, C.M.²

10
- 0038510005
- J.D. Holmes D.M. Lyons K.J. Ziegler Chem. Eur. J. 9 2003 2144
- (2003) Chem. Eur. J. , vol.9 , pp. 2144
- Holmes, J.D.¹ Lyons, D.M.² Ziegler, K.J.³

11
- 1942438680
- E.T. Hunde J.J. Watkins Chem. Mater. 16 2004 498
- (2004) Chem. Mater. , vol.16 , pp. 498
- Hunde, E.T.¹ Watkins, J.J.²

12
- 13244286015
- A. Cabanas D.P. Long J.J. Watkins Chem. Mater. 16 2004 2028
- (2004) Chem. Mater. , vol.16 , pp. 2028
- Cabanas, A.¹ Long, D.P.² Watkins, J.J.³

13
- 0042768125
- A. Cabanas X. Shan J.J. Watkins Chem. Mater. 15 2003 2910
- (2003) Chem. Mater. , vol.15 , pp. 2910
- Cabanas, A.¹ Shan, X.² Watkins, J.J.³

14
- 0037450276
- X.R. Ye Y. Lin C. Wang C.M. Wai Adv. Mater. 15 2003 316
- (2003) Adv. Mater. , vol.15 , pp. 316
- Ye, X.R.¹ Lin, Y.² Wang, C.³ Wai, C.M.⁴

15
- 1642328206
- X.R. Ye Y. Lin C. Wang M.H. Engelhard Y. Wang C.M. Wai J. Mater. Chem. 14 2004 908
- (2004) J. Mater. Chem. , vol.14 , pp. 908
- Ye, X.R.¹ Lin, Y.² Wang, C.³ Engelhard, M.H.⁴ Wang, Y.⁵ Wai, C.M.⁶

16
- 0023453799
- D.W. Matson J.L. Fulton R.C. Petersen R.D. Smith Ind. Eng. Chem. Res. 26 1987 2298
- (1987) Ind. Eng. Chem. Res. , vol.26 , pp. 2298
- Matson, D.W.¹ Fulton, J.L.² Petersen, R.C.³ Smith, R.D.⁴

17
- 33751390850
- B.N. Hansen B.M. Hybertson R.M. Barkley R.E. Sievers Chem. Mater. 4 1992 749
- (1992) Chem. Mater. , vol.4 , pp. 749
- Hansen, B.N.¹ Hybertson, B.M.² Barkley, R.M.³ Sievers, R.E.⁴

18
- 33748514791
- J.A. Darr M. Poliakoff A.J. Blake J. Chem. Soc. Dalton Trans. 1997 2869
- (1997) J. Chem. Soc. Dalton Trans. , pp. 2869
- Darr, J.A.¹ Poliakoff, M.² Blake, A.J.³

19
- 0030168304
- V.K. Popov V.N. Bagratashvili D.A. Lemonovski Thin Solid Films 279 1996 66
- (1996) Thin Solid Films , vol.279 , pp. 66
- Popov, V.K.¹ Bagratashvili, V.N.² Lemonovski, D.A.³

20
- 0029633272
- O.A. Louchev V.K. Popov E.N. Antonov J. Cryst. Growth 155 1995 276
- (1995) J. Cryst. Growth , vol.155 , pp. 276
- Louchev, O.A.¹ Popov, V.K.² Antonov, E.N.³

21
- 0027946967
- J.F. Bocquet K. Chhor C. Pommier Surf. Coat. Technol. 70 1994 73
- (1994) Surf. Coat. Technol. , vol.70 , pp. 73
- Bocquet, J.F.¹ Chhor, K.² Pommier, C.³

22
- 0035812811
- J.M. Blackburn D.P. Long A. Cabanas J.J. Watkins Science 294 2001 141
- (2001) Science , vol.294 , pp. 141
- Blackburn, J.M.¹ Long, D.P.² Cabanas, A.³ Watkins, J.J.⁴

23
- 0033809946
- J.M. Blackburn D.P. Long J.J. Watkins Chem. Mater. 12 2000 2625
- (2000) Chem. Mater. , vol.12 , pp. 2625
- Blackburn, J.M.¹ Long, D.P.² Watkins, J.J.³

24
- 0033701031
- D.P. Long J.M. Blackburn J.J. Watkins Adv. Mater. 12 2000 913
- (2000) Adv. Mater. , vol.12 , pp. 913
- Long, D.P.¹ Blackburn, J.M.² Watkins, J.J.³

25
- 0035835040
- N.R.B. Coleman M.A. Morris T.R. Spalding J.D. Holmes J. Am. Chem. Soc. 123 2001 187
- (2001) J. Am. Chem. Soc. , vol.123 , pp. 187
- Coleman, N.R.B.¹ Morris, M.A.² Spalding, T.R.³ Holmes, J.D.⁴

26
- 84957232737
- L.A. Nagahara T. Ohmori K. Hashimoto A. Fujishima J. Vac. Sci. Technol. A11 1993 763
- (1993) J. Vac. Sci. Technol. , vol.A11 , pp. 763
- Nagahara, L.A.¹ Ohmori, T.² Hashimoto, K.³ Fujishima, A.⁴

27
- 0029342909
- L. Mouche F. Tardif J. Derrien J. Electrochem. Soc. 142 1995 2395
- (1995) J. Electrochem. Soc. , vol.142 , pp. 2395
- Mouche, L.¹ Tardif, F.² Derrien, J.³

28
- 0033075854
- S. Karmalkar J.J. Banerjee Electrochem. Soc. 146 1999 580
- (1999) Electrochem. Soc. , vol.146 , pp. 580
- Karmalkar, S.¹ Banerjee, J.J.²

29
- 11644297902
- T. Homma C.P. Wade C.E.D. Chidsey J. Phys. Chem., B 102 1998 7919
- (1998) J. Phys. Chem., B , vol.102 , pp. 7919
- Homma, T.¹ Wade, C.P.² Chidsey, C.E.D.³

30
- 0035119904
- S.W. Lim R.T. Mo P.A. Pianetta C.E.D. Chidsey J. Electrochem. Soc. 148 2001 C16
- (2001) J. Electrochem. Soc. , vol.148
- Lim, S.W.¹ Mo, R.T.² Pianetta, P.A.³ Chidsey, C.E.D.⁴

31
- 0037050251
- S. Warren A. Reitzle A. Kazimirov J.C. Ziegler O. Bunk L.X. Cao F.U. Renner D.M. Kolb M.J. Bedzyk J. Zegenhagen Surf. Sci. 496 2002 287
- (2002) Surf. Sci. , vol.496 , pp. 287
- Warren, S.¹ Reitzle, A.² Kazimirov, A.³ Ziegler, J.C.⁴ Bunk, O.⁵ Cao, L.X.⁶ Renner, F.U.⁷ Kolb, D.M.⁸ Bedzyk, M.J.⁹ Zegenhagen, J.¹⁰

32
- 0034188196
- J.C. Ziegler G. Scherb O. Bunk A. Kazimirov L.X. Cao D.M. Kolb R.L. Johnson J. Zegenhagen Surf. Sci. 452 2000 150
- (2000) Surf. Sci. , vol.452 , pp. 150
- Ziegler, J.C.¹ Scherb, G.² Bunk, O.³ Kazimirov, A.⁴ Cao, L.X.⁵ Kolb, D.M.⁶ Johnson, R.L.⁷ Zegenhagen, J.⁸

33
- 0034290906
- J.C. Ziegler A. Reitzle O. Bunk J. Zegenhagen D.M. Kolb Electrochim. Acta 45 2000 4599
- (2000) Electrochim. Acta , vol.45 , pp. 4599
- Ziegler, J.C.¹ Reitzle, A.² Bunk, O.³ Zegenhagen, J.⁴ Kolb, D.M.⁵

34
- 0037435549
- X.R. Ye C.M. Wai D. Zhang Y. Kranov D.N. McIlroy Y. Lin M. Engelhard Chem. Mater. 15 2003 83
- (2003) Chem. Mater. , vol.15 , pp. 83
- Ye, X.R.¹ Wai, C.M.² Zhang, D.³ Kranov, Y.⁴ McIlroy, D.N.⁵ Lin, Y.⁶ Engelhard, M.⁷

35
- 0000514280
- INSPEC London L. Canham (Ed.)
- M. Thonissen M. Kruger G. Lerondel R. Romestain L. Canham Properties of Porous Silicon 1997 INSPEC London 349
- (1997) Properties of Porous Silicon , pp. 349
- Thonissen, M.¹ Kruger, M.² Lerondel, G.³ Romestain, R.⁴

36
- 0031359381
- W. Thei Surf. Sci. Rep. 29 1997 91
- (1997) Surf. Sci. Rep. , vol.29 , pp. 91
- Thei, W.¹

37
- 0033726229
- O. Bisi S. Ossicini L. Pavesi Surf. Sci. Rep. 38 2000 1
- (2000) Surf. Sci. Rep. , vol.38 , pp. 1
- Bisi, O.¹ Ossicini, S.² Pavesi, L.³

38
- 0001753504
- A.G. Cullis L.T. Canham P.D.J. Calcott J. Appl. Phys. 82 1997 909
- (1997) J. Appl. Phys. , vol.82 , pp. 909
- Cullis, A.G.¹ Canham, L.T.² Calcott, P.D.J.³

39
- 0034248458
- G. Lammel P. Renaud Sens. Actuators, A, Phys. 85 2000 356
- (2000) Sens. Actuators, A, Phys. , vol.85 , pp. 356
- Lammel, G.¹ Renaud, P.²

40
- 0343244614
- R. Arens-Fischer R.M. Kruger M. Thonissen V. Ganse D. Hunkel M. Marso H. Luth J. Porous Mater. 7 2000 223
- (2000) J. Porous Mater. , vol.7 , pp. 223
- Arens-Fischer, R.¹ Kruger, R.M.² Thonissen, M.³ Ganse, V.⁴ Hunkel, D.⁵ Marso, M.⁶ Luth, H.⁷

41
- 0343878078
- S.E. Letant S. Content T.T. Tan F. Zenhausern M.J. Sailor Sens. Actuators, B, Chem. 69 2000 193
- (2000) Sens. Actuators, B, Chem. , vol.69 , pp. 193
- Letant, S.E.¹ Content, S.² Tan, T.T.³ Zenhausern, F.⁴ Sailor, M.J.⁵

42
- 0034250132
- C. Baratto G. Sberveglieri E. Comini G. Faglia G. Benussi V. La Ferrara L. Quercia G. Di Francia V. Guidi D. Vincenzi D. Boscarino V. Rigato Sens. Actuators, B, Chem. 68 2000 74
- (2000) Sens. Actuators, B, Chem. , vol.68 , pp. 74
- Baratto, C.¹ Sberveglieri, G.² Comini, E.³ Faglia, G.⁴ Benussi, G.⁵ La Ferrara, V.⁶ Quercia, L.⁷ Di Francia, G.⁸ Guidi, V.⁹ Vincenzi, D.¹⁰ Boscarino, D.¹¹ Rigato, V.¹²

43
- 0031730953
- V. Polishchuk E. Souteyrand J.R. Martin V.I. Strikha V.A. Skryshevsky Anal. Chim. Acta 375 1998 205
- (1998) Anal. Chim. Acta , vol.375 , pp. 205
- Polishchuk, V.¹ Souteyrand, E.² Martin, J.R.³ Strikha, V.I.⁴ Skryshevsky, V.A.⁵

44
- 0033687514
- M.P. Stewart J.M. Buriak Adv. Mater. 12 2000 859
- (2000) Adv. Mater. , vol.12 , pp. 859
- Stewart, M.P.¹ Buriak, J.M.²

45
- 0034840343
- A.N. Parbukov V.I. Beklemyshev V.M. Gontar I.I. Makhonin S.A. Gavrilov S.C. Bayliss Mater. Sci. Eng., C, Biomim. Mater., Sens. Syst. C15 2001 121
- (2001) Mater. Sci. Eng., C, Biomim. Mater., Sens. Syst. , vol.C15 , pp. 121
- Parbukov, A.N.¹ Beklemyshev, V.I.² Gontar, V.M.³ Makhonin, I.I.⁴ Gavrilov, S.A.⁵ Bayliss, S.C.⁶

46
- 0035361026
- B. Unal A.N. Parbukov S.C. Bayliss Opt. Mater. 17 2001 79
- (2001) Opt. Mater. , vol.17 , pp. 79
- Unal, B.¹ Parbukov, A.N.² Bayliss, S.C.³

47
- 3242850039
- B. Unal S.C. Bayliss D.T. Clarke J. Appl. Phys. 87 2000 3547
- (2000) J. Appl. Phys. , vol.87 , pp. 3547
- Unal, B.¹ Bayliss, S.C.² Clarke, D.T.³

48
- 0014800514
- W. Kern D.A. Puotinen RCA Rev. 31 1970 187
- (1970) RCA Rev. , vol.31 , pp. 187
- Kern, W.¹ Puotinen, D.A.²

49
- 0031235607
- Y.I. Lee K.H. Park J. Lee C.S. Lee H.J. Yoo C.J. Kim Y.S. Yoon J. Microelectromechanical Syst. 6 1997 226
- (1997) J. Microelectromechanical Syst. , vol.6 , pp. 226
- Lee, Y.I.¹ Park, K.H.² Lee, J.³ Lee, C.S.⁴ Yoo, H.J.⁵ Kim, C.J.⁶ Yoon, Y.S.⁷

50
- 0018335403
- D.F. Weston R.J. Mattox J. Vac. Sci. Technol. 17 1980 466
- (1980) J. Vac. Sci. Technol. , vol.17 , pp. 466
- Weston, D.F.¹ Mattox, R.J.²

51
- 0142027123
- Y. Enokida O. Tomioka S.C. Lee A. Rustenholtz C.M. Wai Ind. Eng. Chem. Res. 42 2003 5037
- (2003) Ind. Eng. Chem. Res. , vol.42 , pp. 5037
- Enokida, Y.¹ Tomioka, O.² Lee, S.C.³ Rustenholtz, A.⁴ Wai, C.M.⁵

52
- 0030684596
- T.N. Khoperia T.J. Tabatadze T.I. Zedgenidze Electrochim. Acta 42 1997 3049
- (1997) Electrochim. Acta , vol.42 , pp. 3049
- Khoperia, T.N.¹ Tabatadze, T.J.² Zedgenidze, T.I.³

53
- 8144224348
- U.S. Patent 5,358,907
- K.H. Wong, U.S. Patent 5,358,907, 1994.
- (1994) , vol.358 , pp. 907
- Wong, K.H.¹

54
- 0019532787
- J.H. Thomas III D.E. Carlson J. Electrochem. Soc. 128 1981 415
- (1981) J. Electrochem. Soc. , vol.128 , pp. 415
- Thomas, J.H.¹ Carlson, D.E.²

55
- 0029249994
- D. Dai I. Davoli Vacuum 46 1995 139
- (1995) Vacuum , vol.46 , pp. 139
- Dai, D.¹ Davoli, I.²

56
- 0023965935
- C.S. Wei J. Van der Spiegel J.J. Santiago J. Electrochem. Soc. 135 1988 446
- (1988) J. Electrochem. Soc. , vol.135 , pp. 446
- Wei, C.S.¹ Van der Spiegel, J.² Santiago, J.J.³

57
- 0000508887
- B. Coulman H. Chen J. Appl. Phys. 59 1986 3467
- (1986) J. Appl. Phys. , vol.59 , pp. 3467
- Coulman, B.¹ Chen, H.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.