Formation of porous silicon filter structures with different properties on small areas

Journal of Porous Materials

Volumn 7, Issue 1, 2000, Pages 223-225

  Arens Fischer, R ^a   Kruger M ^a   Thonissen M ^a   Ganse, V ^a   Hunkel, D ^a   Marso, M ^a   Luth H ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC DEVICES; MICROOPTICS; MIRRORS; OPTICAL FILTERS; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING;

DIELECTRIC FILTERS;

POROUS SILICON;

EID: 0343244614     PISSN: 13802224     EISSN: None     Source Type: Journal    
DOI: 10.1023/a:1009651224071     Document Type: Article

References (4)

1. A.G. Nassiopoulos, S. Grigoropoulos, L. Canham et al., Thin Solid Films 255, 329 (1995).
2. M. Krüger, R. Arens-Fischer, M. Thönissen et al., Thin Solid Films 276, 257 (1996).
3. M.G. Berger, C. Dieker, M. Thönissen et al., J. Appl. Phys. 27, 1333 (1994).
4. M.G. Berger, R. Arens-Fischer, M. Thönissen et al., Thin Solid Films 297, 237 (1997).