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Volumn 12, Issue 12, 2000, Pages 913-915

Chemical fluid deposition: A hybrid technique for low-temperature metallization

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; CHEMICAL VAPOR DEPOSITION; ELECTROPLATING; LOW TEMPERATURE EFFECTS; METALLIZING; ORGANIC SOLVENTS; REDUCTION; TRANSPORT PROPERTIES;

EID: 0033701031     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-4095(200006)12:12<913::AID-ADMA913>3.0.CO;2-#     Document Type: Article
Times cited : (120)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.