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Volumn 12, Issue 12, 2000, Pages 913-915
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Chemical fluid deposition: A hybrid technique for low-temperature metallization
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON DIOXIDE;
CHEMICAL VAPOR DEPOSITION;
ELECTROPLATING;
LOW TEMPERATURE EFFECTS;
METALLIZING;
ORGANIC SOLVENTS;
REDUCTION;
TRANSPORT PROPERTIES;
CHEMICAL FLUID DEPOSITION (CFD);
ORGANOMETALLICS;
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EID: 0033701031
PISSN: 09359648
EISSN: None
Source Type: Journal
DOI: 10.1002/1521-4095(200006)12:12<913::AID-ADMA913>3.0.CO;2-# Document Type: Article |
Times cited : (120)
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References (13)
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