Free-standing, mobile 3D porous silicon microstructures

Sensors and Actuators, A: Physical

Volumn 85, Issue 1, 2000, Pages 356-360

  Lammel, G ^a   Renaud, Ph ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTROCHEMISTRY; ELECTROLYTIC POLISHING; ETCHING; FABRICATION; MASKS; METALLOGRAPHIC MICROSTRUCTURE; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PORE SIZE; POROSITY;

ELECTROCHEMICAL ETCH CELL; SACRIFICIAL LAYERS; THREE DIMENSIONAL POROUS SILICON MICROSTRUCTURES;

POROUS SILICON;

EID: 0034248458     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00382-4     Document Type: Article

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