Metrological atomic force microscope using a large range scanning dual stage

International Journal of Precision Engineering and Manufacturing

Volumn 10, Issue 5, 2009, Pages 11-17

  Kim, Jong Ahn ^a   Kim, Jae Wan ^a   Kang, Chu Shik ^a   Eom, Tae Bong ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Atomic force microscope; Dual stage; Grating; Laser interferometer; Pitch

Indexed keywords

EID: 77149177690     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12541-009-0087-z     Document Type: Article

References (13)

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