Design of a long stroke translation stage for AFM

International Journal of Machine Tools and Manufacture

Volumn 50, Issue 2, 2010, Pages 183-190

  Werner, C ^a   Rosielle, P C J N ^a   Steinbuch, M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Differential plane mirror interferometer; Elastic straight guide; Lorentz actuator; Metrological atomic force microscope; Stiffness compensation; Thermal centre

Indexed keywords

ACTUATION SYSTEMS; AFM; DIFFERENTIAL PLANE MIRROR INTERFEROMETER; LORENTZ; LORENTZ ACTUATORS; MEASUREMENT SYSTEM; METROLOGICAL ATOMIC FORCE MICROSCOPE; PLANE MIRRORS; TRANSLATION STAGE;

ACTUATORS; ATOMIC FORCE MICROSCOPY; INTERFEROMETERS; INTERFEROMETRY; LORENTZ FORCE; MIRRORS; STIFFNESS;

MAGNETIC FIELD EFFECTS;

EID: 72649087187     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2009.10.012     Document Type: Article

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