A metrological large range atomic force microscope with improved performance

Review of Scientific Instruments

Volumn 80, Issue 4, 2009, Pages

  Dai, Gaoliang ^a   Wolff, Helmut ^a   Pohlenz, Frank ^a   Danzebrink, Hans Ulrich ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; BEAM DEFLECTIONS; CANTILEVER TIPS; CORRECTION METHODS; GEOMETRICAL PARAMETERS; HOMODYNE INTERFEROMETERS; INTERFEROMETER MEASUREMENTS; INTERSECTION POINTS; LINE WIDTHS; MEASUREMENT FUNCTIONS; MEASUREMENT PRINCIPLES; MEASUREMENT PROCESS; MEASUREMENT SOFTWARES; METROLOGICAL PERFORMANCE; NANO ROUGHNESS; NON LINEARITIES; ONE-DIMENSIONAL GRATINGS; OPTICAL INTERFERENCES; PHYSIKALISCH-TECHNISCHE BUNDESANSTALT; SAMPLE SURFACES; STEP HEIGHTS; THREE DIMENSIONS; Z DIRECTIONS;

ATOMS; BALL BEARINGS; BEARINGS (MACHINE PARTS); ELECTRIC REACTORS; GRAPHICAL USER INTERFACES; INTERFEROMETERS; INTERFEROMETRY; SCANNING;

ATOMIC FORCE MICROSCOPY;

EID: 65449180343     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3109901     Document Type: Article

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