Dimensional metrology with the NIST calibrated atomic force microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3677, Issue I, 1999, Pages 20-34

  Dixson, Ronald ^a   Koening, Rainer ^a   Tsai, Vincent W ^a   Fu, Joseph ^a   Vorburger, Theodore V ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; CALIBRATION; INTERFEROMETERS; LASERS; PIEZOELECTRIC DEVICES; SENSORS; SPATIAL VARIABLES MEASUREMENT; STANDARDS;

PITCH MEASUREMENT; STEP HEIGHT MEASUREMENT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032628371     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350822     Document Type: Conference Paper

References (30)