Atomic force microscope for accurate dimensional metrology

Precision Engineering

Volumn 33, Issue 2, 2009, Pages 135-149

  Mazzeo, A D ^a   Stein, A J ^a   Trumper, D L ^a   Hocken, R J ^b  

^a Massachusetts Institute of Technology   (United States)

^b University of North Carolina at Charlotte   (United States)

Author keywords

Atomic force microscope; Capacitance sensors; Metrology; Probe

Indexed keywords

ABERRATIONS; ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; ATOMS; CAPACITANCE; MICROSCOPES; OPTICAL FIBERS; OPTICAL PROPERTIES; OXIDE MINERALS; QUARTZ; SENSORS; SURFACE TOPOGRAPHY;

AFM; ATOMIC FORCE MICROSCOPE; CAPACITANCE SENSORS; DIGITAL CONTROLLERS; DIMENSIONAL METROLOGIES; DIRECT MEASUREMENTS; LATERAL MEASUREMENTS; METROLOGY; PC-BASED; PIEZOELECTRIC TUBES; PROBE; PROBE TIPS; QUARTZ TUNING FORKS; SAMPLE SURFACES; SQUARE WAVES; STEP HEIGHTS; TAPPING MODES; VERTICAL DIRECTIONS;

PROBES;

EID: 59649086436     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2008.04.007     Document Type: Article

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