Design of a thermally and mechanically stable metrological atomic force microscope at KULeuven

Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009

Volumn 2, Issue , 2009, Pages 227-230

  Piot, Jan ^a   Qian, Jun ^a   Pirée, Hugo ^b   Kotte, Gerard ^b   Van Haesendonck, Chris ^a   Reynaerts, Dominiek ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b FPS Economy SMD Metrology ^*  (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICALLY STABLE; METROLOGICAL ATOMIC FORCE MICROSCOPE;

EID: 80051682683     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Industrial uses of STM and AFM, T. V. Vorburger, J. A. Dagata, G. Wilkening, K. Iizuka, Annals of the CIRP, 46(2), 1997
2. Advances in Scanning Force Microscopy for Dimensional Metrology, H.-U. Danzebrink, L. Koenders, G. Wilkening, A. Yacoot, H. Kunzmann, Annals of the CIRP, 55(2), 2006
3. Principles of precision engineering, H. Nakazawa, Oxford University Press, 1994
4. Precision machine design, A. H. Slocum, Prentice Hall, New Jersey, 1992