Measurement of microscope calibration standards in nanometrology using a metrological atomic force microscope

Measurement Science and Technology

Volumn 17, Issue 7, 2006, Pages 1792-1800

  Kim, Jong Ahn ^a   Kim, Jae Wan ^a   Park, Byong Chon ^a   Eom, Tae Bong ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Atomic force microscope; Grating pitch; Microscope calibration standard; Nanometrology; Step height

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; SENSORS;

GRATING PITCH; MICROSCOPE CALIBRATION STANDARD; NANOMETROLOGY; STEP HEIGHT;

MEASUREMENT THEORY;

ATOMIC FORCE MICROSCOPY; CALIBRATION; MEASUREMENT THEORY; SENSORS;

EID: 33745490530     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/7/018     Document Type: Conference Paper

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