A nano-metrology system with a two-dimensional combined optical and X-ray interferometer and an atomic force microscope

Microsystem Technologies

Volumn 15, Issue 12, 2009, Pages 1879-1884

  Park, Jinwon ^a   Lee, Moo Yeon ^b   Lee, Dong Yeon ^c  

^a Samsung Electro Mechanics   (South Korea)

^b Korea University   (South Korea)

^c Yeungnam University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPES; CANTILEVER TIP; COMBINED OPTICAL AND X-RAY INTERFEROMETER; MEASURING SYSTEMS; NANO SCALE; NANOMETER MEASUREMENT; NANOMETER REGION; NANOMETROLOGY; OPTICAL INTERFEROMETER; STANDARDIZATION OF MEASUREMENT;

ATOMIC FORCE MICROSCOPY; INTERFEROMETERS; INTERFEROMETRY; MEASUREMENT THEORY; NANOSTRUCTURED MATERIALS; X RAY ANALYSIS;

TWO DIMENSIONAL;

EID: 76449116712     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0916-0     Document Type: Article

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