Recent advances in traceable nanoscale dimension and force metrology in the UK

Measurement Science and Technology

Volumn 17, Issue 3, 2006, Pages 467-476

  Leach, Richard ^a   Chetwynd, Derek ^b   Blunt, Liam ^c   Haycocks, Jane ^a   Harris, Peter ^a   Jackson, Keith ^a   Oldfield, Simon ^a   Reilly, Simon ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b UNIVERSITY OF WARWICK   (United Kingdom)

^c UNIVERSITY OF HUDDERSFIELD   (United Kingdom)

Author keywords

Areal surface texture; Low force; Micrometrology; Nanometrology; Surface topography; Traceability

Indexed keywords

CALIBRATION; INTERNET; MECHANICAL TESTING; MICROSTRUCTURE; NANOTECHNOLOGY; PROBES;

AREAL SURFACE TEXTURE; LOW FORCE; MICROMETROLOGY; NANOMETROLOGY; TRACEABILITY;

FORCE MEASUREMENT;

CALIBRATION; FORCE MEASUREMENT; INTERNET; MECHANICAL TESTING; MICROSTRUCTURE; NANOTECHNOLOGY; PROBES;

EID: 31644438884     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/3/S02     Document Type: Article

References (35)

1. Brennan J K, Crampton A, Jiang X, Leach R K and Harris P M 2005 Reconstruction of continuous surface profiles from discretely sampled data Proc. 5th Euspen Int. Conf. (Montpellier, France, 8-11 May)
2. Bui S H, Reneger T B and Vorburger T V 2004 Virtual surface calibration database Proc. 11th Int. Coll. on Surfaces (Chemnitz, Germany, 2-3 Feb.) pp 93-101
3. Cumpson P J and Hedley J 2003 Accurate analytical measurement in the atomic force microscope: a microfabricated spring constant standard potentially traceable to the SI Nanotechnology 14 1279-88
4. Cumpson P J, Hedley J and Zhdan P 2003 Accurate force measurement in the atomic force microscope: a microfabricated array of reference springs for easy cantilever calibration Nanotechnology 14 918-24
5. Doering L, Peiner E, Nesterov V and Brand U 2004 Low noise piezoresistive micro force sensor Proc. Nanoscale (Brauschweig, Germany)
6. Downs M J and Nunn J W 1998 Verification of the subnanometric capability of an NPL plane mirror differential interferometer with a capacitance probe Meas. Sci. Technol. 9 1437-40
7. Evans C J and Bryan J B 1999 Structured, textured or engineered surfaces Ann. CIRP 48 541-56
8. Forbes A B and Leach R K 2005 Self-calibration of a novel surface texture measuring instrument Proc. 7th Lambdamap Conf. (Cranfield, UK, 27-30 June)
9. Fruehauf J, Gaertner E, Brand U and Doering L 2004 Silicon springs for the calibration of the force of hardness testing instruments and tactile profilometers Proc. 4th Euspen Int. Conf. (Glasgow, 31 May-2 June) pp 362-3
10. Haycocks J and Jackson K 2005 Traceable calibration of transfer standards for scanning probe microscopy Precis. Eng. 29 168-75
11. Henselmans R, Rosielle N, Cacace L, Kappelhof P, Klinkhamer F and Spierdijk H 2004 Low force measurement facility: mechanical design report (Technical University of Eindhoven)
12. Hughes E B and Oldfield S 2003 Traceable, high accuracy thrust measurement for electric propulsion 3rd Int. Electric Propulsion Conf. (Toulouse, France, June)
13. ISO 4287 1997 Geometrical product specification (GPS)-surface texture: profile method-terms, definitions and surface texture parameters (International Organization for Standardization)
14. ISO 5436: Part 1 2000 Geometrical product specification (GPS)-surface texture: profile method-measurement standards-material measures (International Organization for Standardization)
15. ISO 5436: Part 2 2002 Geometrical product specification (GPS)-surface texture: profile method-measurement standards-software measurement standards (International Organization for Standardization)
16. Jung L, Spranger B, Krüger-Sehm R, Koenders L and Krystek M 2004 Reference software for roughness analysis-features and results Proc. 11th Int. Coll. on Surfaces (Chemnitz, Germany, 2-3 Feb.) pp 164-9
17. Koenders L, Andreason J L, De Chiffre L, Jung L and Krüger-Sehm R 2004 EUROMET S-11 comparison on surface texture Metrologia 41 (Tech. Suppl.) 04001
18. Leach R K 2000 Traceable measurement of surface texture at the National Physical Laboratory using NanoSurf IV Meas. Sci. Technol. 11 1162-72
19. Leach R K 2004 Some issues of traceability in the field of surface texture measurement Wear 257 1246-9
20. Leach R K and Bennett I 2004 Characterisation of a new vertical scanning white light interferometer-a test case? Proc. 11th Int. Coll. on Surfaces (Chemnitz, Germany, 2-3 Feb.) pp 11-8
21. Leach R K and Harris P M 2002 Ambiguities in the definition of spacing parameters for surface-texture characterization Meas. Sci. Technol. 13 1924-30
22. Leach R K and Hart A 2002 A comparison of stylus and optical methods for measuring 2D surface texture NPL Report CBTLM 15 1-33
23. Leach R K, Haycocks J, Jackson K, Lewis A J, Oldfield S and Yacoot A 2001 Advances in traceable nanometrology at the National Physical Laboratory Nanotechnology 12 R1-R6
24. Leach R K, Murphy J and Wilson A 2004a Design of a co-ordinate probe for characterising three-dimensional micro-structures NPL Report CBTLM 30 1-48
25. Leach R K, Oldfield S, Awan S, Blackburn J and Williams J M 2004b Design of a bi-directional electrostatic actuator for realising nanonewton to micronewton forces NPL Report DEPC-EM-001 1-32
26. McCarthy M B and Gee A T 1996 A 120 mm × 120 mm area photomask metrology standard with absolute position accuracy of 60 nm Proc. ASPE 11 190-5
27. Nunn J 2000 Calibration of 2 dimensional magnification standards for SPMs and SEMs through optical diffraction: method, traceability and uncertainties Proc. 4th Seminar on Quantitative Microscopy QM 2000 (Braunschweig, Germany) pp 17-24
28. Pratt J R, Douglas D T, Newell D B, Kramer J A and Whitenten E 2004 Progress toward SI traceable force metrology for nanomechanics J. Mater. Res. 19 366-79
29. Royal Society and Royal Academy of Engineering 2004 Nanoscience and Nanotechnologies: Opportunities and Uncertainties
30. Schwenke H, Wäldele F, Weiskirch C and Kunzmann H 2001 Opto-tactile sensor for 2D and 3D measurement of small structures on coordinate measuring machines Ann. CIRP 50 361-4
31. Thomsen-Schmidt P and Krüger-Sehm R 2004 Development of a new stylus contacting system for roughness measurement Proc. 11th Int. Coll. on Surfaces (Chemnitz, Germany, 2-3 Feb.) pp 79-85
32. Weckenmann A, Estler T, Peggs G N and McMurty D 2004 Probing systems in dimensional metrology Ann. CIRP 53 657-84
33. Wichmann B A, Parkin G I and Barker R 2004 Software Support for Metrology Best Practice Guide No. 1: Validation of Software in Measurement Instruments (National Physical Laboratory)
34. Yacoot A and Cross N 2002 Measurement of picometre non-linearity in an optical grating encoder using x-ray interferometry Meas. Sci. Technol. 14 148-52
35. Yacoot A and Downs M J 2000 The use of x-ray interferometry to investigate the linearity of the NPL differential plane mirror interferometer Meas. Sci. Technol. 11 1126-30