메뉴 건너뛰기




Volumn 18, Issue 5, 2011, Pages

Nanoscale control of energy and matter in plasmasurface interactions: Toward energy- and matter-efficient nanotech

Author keywords

[No Author keywords available]

Indexed keywords

ELEMENTARY PROCESS; ENERGY EFFICIENT; GRAND CHALLENGE; NANO SCALE; NANOSCALE CONTROL; NONEQUILIBRIUM CONDITIONS; PLASMA-SURFACE INTERACTIONS; RENEWABLE ENERGIES; SELF-ORGANIZATIONS; SELF-ORGANIZED ARRAYS; SIZE RANGES; SUBNANOMETERS;

EID: 79958781019     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3560509     Document Type: Article
Times cited : (5)

References (86)
  • 1
    • 59849106180 scopus 로고    scopus 로고
    • BESAC Subcommittee on Grand Challenges for Basic Energy Sciences, U.S. Department of Energy, edited by A. L. Robinson.
    • Directing Matter and Energy: Five Challenges for Science and the Imagination, BESAC Subcommittee on Grand Challenges for Basic Energy Sciences, U.S. Department of Energy, edited by, A. L. Robinson, http://www.sc.doe.gov/bes/ reports/list.html.
    • Directing Matter and Energy: Five Challenges for Science and the Imagination
  • 3
    • 26244451229 scopus 로고    scopus 로고
    • Reactive plasmas as a versatile nanofabrication tool
    • DOI 10.1103/RevModPhys.77.489
    • K. Ostrikov, Rev. Mod. Phys. 77, 489 (2005). 10.1103/RevModPhys.77.489 (Pubitemid 41508765)
    • (2005) Reviews of Modern Physics , vol.77 , Issue.2 , pp. 489-511
    • Ostrikov, K.1
  • 4
    • 34248570861 scopus 로고    scopus 로고
    • Plasma-aided nanofabrication: Where is the cutting edge?
    • DOI 10.1088/0022-3727/40/8/S01, PII S0022372707438153, S01
    • K. Ostrikov and A. B. Murphy, J. Phys. D: Appl. Phys. 40, 2223 (2007). 10.1088/0022-3727/40/8/S01 (Pubitemid 46778347)
    • (2007) Journal of Physics D: Applied Physics , vol.40 , Issue.8 , pp. 2223-2241
    • Ostrikov, K.1    Murphy, A.B.2
  • 5
    • 79958813032 scopus 로고    scopus 로고
    • International Technology Roadmafor Semiconductors. Semiconductor Industry Association. Available from (Chapter Emerging Research Devices).
    • International Technology Roadmap for Semiconductors. Semiconductor Industry Association. Available from http://www.itrs.net (Chapter Emerging Research Devices).
  • 16
  • 18
    • 36248956669 scopus 로고    scopus 로고
    • Research directions in beyond CMOS computing
    • DOI 10.1016/j.sse.2007.09.018, PII S0038110107003292, Papers Selected from the 36th European Solid-State Device Research Conference - ESSDERC'06
    • G. I. Bourianoff, P. A. Gargini, and D. E. Nikonov, Solid-State Electron. 51, 1426 (2007). 10.1016/j.sse.2007.09.018 (Pubitemid 350138026)
    • (2007) Solid-State Electronics , vol.51 , Issue.11-12 , pp. 1426-1431
    • Bourianoff, G.I.1    Gargini, P.A.2    Nikonov, D.E.3
  • 20
    • 27144434143 scopus 로고    scopus 로고
    • Engineering atomic and molecular nanostructures at surfaces
    • DOI 10.1038/nature04166, PII N04166
    • J. V. Barth, G. Costantini, and K. Kern, Nature (London) 437, 671 (2005). 10.1038/nature04166 (Pubitemid 41486530)
    • (2005) Nature , vol.437 , Issue.7059 , pp. 671-679
    • Barth, J.V.1    Costantini, G.2    Kern, K.3
  • 22
    • 37549009873 scopus 로고    scopus 로고
    • references therein. 10.1016/j.susc.2007.10.025
    • F. Ratto, T. W. Johnston, S. Heun, and F. Rosei, Surf. Sci. 602, 249 (2008); and references therein. 10.1016/j.susc.2007.10.025
    • (2008) Surf. Sci. , vol.602 , pp. 249
    • Ratto, F.1    Johnston, T.W.2    Heun, S.3    Rosei, F.4
  • 23
    • 27644490333 scopus 로고    scopus 로고
    • Barriers to shape evolution of supported nano-crystallites
    • DOI 10.1016/j.susc.2005.08.012, PII S0039602805008952
    • M. Degawa and E. D. Williams, Surf. Sci. 595, 87 (2005). 10.1016/j.susc.2005.08.012 (Pubitemid 41562877)
    • (2005) Surface Science , vol.595 , Issue.1-3 , pp. 87-96
    • Degawa, M.1    Williams, E.D.2
  • 25
    • 36749101615 scopus 로고    scopus 로고
    • Designing spatial correlation of quantum dots: Towards self-assembled three-dimensional structures
    • DOI 10.1088/0957-4484/19/01/015601, PII S0957448408590489
    • J. R. R. Bortoleto, J. G. Zelcovit, H. R. Gutierrez, J. Bettini, and M. A. Cotta, Nanotechnology 19, 015601 (2008). 10.1088/0957-4484/19/01/015601 (Pubitemid 350212344)
    • (2008) Nanotechnology , vol.19 , Issue.1 , pp. 015601
    • Bortoleto, J.R.R.1    Zelcovit, J.G.2    Gutierrez, H.R.3    Bettini, J.4    Cotta, M.A.5
  • 26
    • 24944509122 scopus 로고    scopus 로고
    • Novel diffusion pathways in low temperature self-organization of nanostructures
    • DOI 10.1016/j.physa.2005.06.028, PII S0378437105006060, Diffusion and Soft Matter Physics Proceedings of the 41st Karpacz Winter School of Theoretical Physics on Diffusion and Soft Matter
    • M. C. Tringides, M. Hupalo, and M. Yakes, Physica A 357, 216 (2005). 10.1016/j.physa.2005.06.028 (Pubitemid 41327887)
    • (2005) Physica A: Statistical Mechanics and its Applications , vol.357 , Issue.2 , pp. 216-249
    • Tringides, M.C.1    Hupalo, M.2    Yakes, M.3
  • 27
    • 0342819025 scopus 로고
    • 10.1038/354056a0
    • S. Iijima, Nature (London) 354, 56 (1991). 10.1038/354056a0
    • (1991) Nature (London) , vol.354 , pp. 56
    • Iijima, S.1
  • 30
    • 34547730770 scopus 로고    scopus 로고
    • Plasma-assisted self-organized growth of uniform carbon nanocone arrays
    • DOI 10.1016/j.carbon.2007.05.030, PII S0008622307002588
    • Z. L. Tsakadze, I. Levchenko, K. Ostrikov, and S. Xu, Carbon 45, 2022 (2007). 10.1016/j.carbon.2007.05.030 (Pubitemid 47238075)
    • (2007) Carbon , vol.45 , Issue.10 , pp. 2022-2030
    • Tsakadze, Z.L.1    Levchenko, I.2    Ostrikov, K.3    Xu, S.4
  • 31
    • 34248378524 scopus 로고    scopus 로고
    • Nanostructures of various dimensionalities from plasma and neutral fluxes
    • DOI 10.1088/0022-3727/40/8/S11, PII S0022372707307614, S11
    • I. Levchenko and K. Ostrikov, J. Phys. D: Appl. Phys. 40, 2308 (2007). 10.1088/0022-3727/40/8/S11 (Pubitemid 46778357)
    • (2007) Journal of Physics D: Applied Physics , vol.40 , Issue.8 , pp. 2308-2319
    • Levchenko, I.1    Ostrikov, K.2
  • 32
  • 33
    • 34547309850 scopus 로고    scopus 로고
    • Ion-assisted precursor dissociation and surface diffusion: Enabling rapid, low-temperature growth of carbon nanofibers
    • DOI 10.1063/1.2750392
    • I. Denysenko and K. Ostrikov, Appl. Phys. Lett. 90, 251501 (2007). 10.1063/1.2750392 (Pubitemid 47141182)
    • (2007) Applied Physics Letters , vol.90 , Issue.25 , pp. 251501
    • Denysenko, I.1    Ostrikov, K.2
  • 34
    • 49949084271 scopus 로고    scopus 로고
    • 10.1016/j.vacuum.2008.03.051
    • K. Ostrikov, Vacuum 83, 4 (2008). 10.1016/j.vacuum.2008.03.051
    • (2008) Vacuum , vol.83 , pp. 4
    • Ostrikov, K.1
  • 36
    • 0037211315 scopus 로고    scopus 로고
    • Determining absolute orientation-dependent step energies: A general theory for the Wulff-construction and for anisotropic two-dimensional island shape fluctuations
    • DOI 10.1016/S0039-6028(02)02315-4, PII S0039602802023154
    • S. V. Khare, S. Kodambaka, D. D. Johnson, I. Petrov, and J. E. Greene, Surf Sci. 522, 75 (2003). 10.1016/S0039-6028(02)02315-4 (Pubitemid 35432752)
    • (2003) Surface Science , vol.522 , Issue.1-3 , pp. 75-83
    • Khare, S.V.1    Kodambaka, S.2    Johnson, D.D.3    Petrov, I.4    Greene, J.E.5
  • 37
    • 79958862005 scopus 로고    scopus 로고
    • 2 molecules) reactive hydrogen atoms is effective for surface termination. (Refs.).
    • 2 molecules) reactive hydrogen atoms is effective for surface termination. (Refs.).
  • 40
    • 70149119180 scopus 로고    scopus 로고
    • 10.1088/0022-3727/42/11/113001
    • U. Kortshagen, J. Phys. D: Appl. Phys. 42, 113001 (2009). 10.1088/0022-3727/42/11/113001
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , pp. 113001
    • Kortshagen, U.1
  • 52
    • 79958825941 scopus 로고    scopus 로고
    • Charging of nanoparticles is extensively studied in the area of dusty (complex) plasmas. The charging process is determined by the microscopic electron and ion currents, which are in turn controlled by the equilibrium electrostatic potential on the surface as well as are very strongly affected by the ionization-diffusionrecombination balance in the plasma discharge. (Refs.).
    • Charging of nanoparticles is extensively studied in the area of dusty (complex) plasmas. The charging process is determined by the microscopic electron and ion currents, which are in turn controlled by the equilibrium electrostatic potential on the surface as well as are very strongly affected by the ionization-diffusionrecombination balance in the plasma discharge. (Refs.).
  • 60
    • 34248383603 scopus 로고    scopus 로고
    • Control of core-shell structure and elemental composition of binary quantum dots
    • DOI 10.1063/1.2737428
    • I. Levchenko, A. E. Rider, and K. Ostrikov, Appl. Phys. Lett. 90, 193110 (2007). 10.1063/1.2737428 (Pubitemid 46738131)
    • (2007) Applied Physics Letters , vol.90 , Issue.19 , pp. 193110
    • Levchenko, I.1    Rider, A.E.2    Ostrikov, K.3
  • 62
    • 77951611376 scopus 로고    scopus 로고
    • 10.1126/science.1186905
    • M. L. Brongersma and V. M. Shalaev, Science 328, 440 (2010). 10.1126/science.1186905
    • (2010) Science , vol.328 , pp. 440
    • Brongersma, M.L.1    Shalaev, V.M.2
  • 63
    • 79958782748 scopus 로고    scopus 로고
    • Control of energy and matter at nanoscales: challenges and opportunities for plasma nanoscience in a sustainability age, J. Phys. D: Appl. Phys. (in press).
    • K. Ostrikov, Control of energy and matter at nanoscales: challenges and opportunities for plasma nanoscience in a sustainability age, J. Phys. D: Appl. Phys. (in press).
    • Ostrikov, K.1
  • 68
    • 34248366587 scopus 로고    scopus 로고
    • Insights into sticking of radicals on surfaces for smart plasma nano-processing
    • DOI 10.1016/j.apsusc.2007.02.006, PII S0169433207001948, The 4th International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces; Negative Ions, their function and Designability, and the 4th EU-Japan Joint Symposium on plasma Pro
    • M. Hori and T. Goto, Appl. Surf. Sci. 253, 6657 (2007). 10.1016/j.apsusc.2007.02.006 (Pubitemid 46734485)
    • (2007) Applied Surface Science , vol.253 , Issue.16 , pp. 6657-6671
    • Hori, M.1    Goto, T.2
  • 69
    • 34247530038 scopus 로고    scopus 로고
    • Plasma nanoscience: From nature's mastery to deterministic plasma-aided nanofabrication
    • DOI 10.1109/TPS.2007.892713, Special Issue on Plenary and Invited Papers from ICOPS 2006
    • K. Ostrikov, IEEE Trans. Plasma Sci. 35, 127 (2007). 10.1109/TPS.2007. 892713 (Pubitemid 46655430)
    • (2007) IEEE Transactions on Plasma Science , vol.35 , Issue.I2 , pp. 127-136
    • Ostrikov, K.1
  • 71
    • 70450179702 scopus 로고    scopus 로고
    • 10.1088/0022-3727/42/21/213001
    • M. Meyyappan, J. Phys. D: Appl. Phys. 42, 213001 (2009). 10.1088/0022-3727/42/21/213001
    • (2009) J. Phys. D: Appl. Phys. , vol.42 , pp. 213001
    • Meyyappan, M.1
  • 77
    • 0037205354 scopus 로고    scopus 로고
    • Structure, bonding state and in-vitro study of Ca-P-Ti film deposited on Ti6A14V by RF magnetron sputtering
    • DOI 10.1016/S0928-4931(02)00029-2, PII S0928493102000292, Biomimetic and supramolecular systems, sympossium B: Biomaterials and tissue engineering. International conference on materials for advanced technologies (ICMAT 2001), July 1-6, 2001
    • J. D. Long, S. Xu, J. W. Cai, N. Jiang, J. H. Lu, K. N. Ostrikov, and C. H. Diong, Mater Sci. Eng. C 20, 175 (2002). 10.1016/S0928-4931(02)00029-2 (Pubitemid 34718493)
    • (2002) Materials Science and Engineering C , vol.20 , Issue.1-2 , pp. 175-180
    • Long, J.D.1    Xu, S.2    Cai, J.W.3    Jiang, N.4    Lu, J.H.5    Ostrikov, K.N.6    Diong, C.H.7
  • 85
    • 33847681379 scopus 로고    scopus 로고
    • Surface fluxes of Si and C adatoms at initial growth stages of SiC quantum dots
    • DOI 10.1063/1.2433752
    • A. E. Rider, I. Levchenko, and K. Ostrikov, J. Appl. Phys. 101, 044306 (2007). 10.1063/1.2433752 (Pubitemid 46362951)
    • (2007) Journal of Applied Physics , vol.101 , Issue.4 , pp. 044306
    • Rider, A.E.1    Levchenko, I.2    Ostrikov, K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.