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Volumn 101, Issue 4, 2007, Pages

Surface fluxes of Si and C adatoms at initial growth stages of SiC quantum dots

Author keywords

[No Author keywords available]

Indexed keywords

ADATOMS; COMPUTER SIMULATION; DEPOSITION; SEMICONDUCTOR QUANTUM DOTS; SILICON CARBIDE; SYNTHESIS (CHEMICAL);

EID: 33847681379     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2433752     Document Type: Article
Times cited : (44)

References (44)
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    • The stoichiometric precursor influx ratio k=1 is most commonly used in many gas-based deposition processes because of the commonsense expectation to achieve a stoichiometric elemental ratio of the elements constituting the quantum dots.
    • The stoichiometric precursor influx ratio kp =1 is most commonly used in many gas-based deposition processes because of the commonsense expectation to achieve a stoichiometric elemental ratio of the elements constituting the quantum dots.
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    • The duration of this stage can be estimated t=θ P+, where θ is the required surface coverage.
    • The duration of this stage can be estimated t=θ P+, where θ is the required surface coverage.
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    • It should be stressed that the surface temperature by itself does not influence the equilibrium quantum dot composition provided that adatom re-evaporation from the surface is weak enough. After a certain time lag (which depends on the process conditions), the elemental composition of the QDs reproduces that of the precursor influx. However, the nonequilibrium QD composition at the initial stage of deposition can significantly affect the nanodot structure at later growth stages.
    • It should be stressed that the surface temperature by itself does not influence the equilibrium quantum dot composition provided that adatom re-evaporation from the surface is weak enough. After a certain time lag (which depends on the process conditions), the elemental composition of the QDs reproduces that of the precursor influx. However, the nonequilibrium QD composition at the initial stage of deposition can significantly affect the nanodot structure at later growth stages.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.