Plasma directed assembly and organization: Bottom-up nanopatterning using top-down technology

Nanotechnology

Volumn 21, Issue 8, 2010, Pages

  Vourdas, N ^a   Kontziampasis, D ^a   Kokkoris, G ^a   Constantoudis, V ^a   Goodyear, A ^a   Tserepi, A ^b   Cooke, M ^b   Gogolides, E ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b OXFORD INSTRUMENTS PLASMA TECHNOLOGY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIRECTED ASSEMBLY; NANOCOLUMN; NANODOTS; NANOPATTERNING; PERIODIC PATTERN; SELF-ASSEMBLY METHOD; SIMULTANEOUS DEPOSITION; TOP-DOWN TECHNOLOGY; TOPDOWN;

PLASMA ETCHING;

EID: 76249123223     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/8/085302     Document Type: Article

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