Electrothermal atomic-force microscope cantilever with integrated heater and n-p-n Back-to-Back Diodes

Journal of Microelectromechanical Systems

Volumn 20, Issue 3, 2011, Pages 644-653

  Fletcher, Patrick C ^a   Bhatia, Bikramjit S ^a   Wu, Yan ^a   Shannon, Mark A ^a   King, William P ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Atomic force microscope (AFM); cantilever; diode; electrothermal (ET); scanning probe microscopy

Indexed keywords

AFM; ALTERNATING CURRENT; CANTILEVER; ELECTROTHERMAL (ET); FREE END; INTEGRATED HEATER; MICRO-CANTILEVERS; SCANNING PROBES; THERMAL ELEMENTS;

ATOMS; DIODES; INTEGRATION; MICROSCOPES; NANOCANTILEVERS; PROBES; SEMICONDUCTOR DIODES;

ATOMIC FORCE MICROSCOPY;

EID: 79957978157     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2127455     Document Type: Article

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